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Volumn 7, Issue 4, 2008, Pages

In-plane rotary comb-drive actuator for a variable optical attenuator

Author keywords

Electrostatic actuation; Microelectromechanical systems (MEMS); Rotary comb drive; Variable optical attenuator (VOA)

Indexed keywords

ACTUATORS; ELECTRIC ATTENUATORS; ELECTROSTATIC ACTUATORS; MEMS; MICROELECTROMECHANICAL DEVICES; SERPENTINE;

EID: 70350150529     PISSN: 19325150     EISSN: 19325134     Source Type: Journal    
DOI: 10.1117/1.3013547     Document Type: Article
Times cited : (24)

References (20)
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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.