Fabrication and performance of MEMS-based piezoelectric power generator for vibration energy harvesting

Microelectronics Journal

Volumn 37, Issue 11, 2006, Pages 1280-1284

  Fang, Hua Bin ^a   Liu, Jing Quan ^a   Xu, Zheng Yi ^b   Dong, Lu ^a   Wang, Li ^b   Chen, Di ^a   Cai, Bing Chu ^a   Liu, Yue ^b  

^a BEIJING UNIVERSITY OF POSTS AND TELECOMMUNICATIONS   (China)

^b HONEYWELL   (United States)

Author keywords

Composite cantilever; Energy harvesting; MEMS; Piezoelectric power generator; Vibration

Indexed keywords

CANTILEVER BEAMS; COMPOSITE STRUCTURES; ETCHING; MICROELECTROMECHANICAL DEVICES; SOL-GELS; VIBRATIONS (MECHANICAL);

ENERGY HARVESTING; GERMANIUM DIODE RECTIFIER; PIEZOELECTRIC POWER GENERATOR;

PIEZOELECTRIC DEVICES;

EID: 33751113307     PISSN: 00262692     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mejo.2006.07.023     Document Type: Article

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