Low speed piezoelectric optical microscanner actuated by piezoelectric microcantilevers using LaNiO3 buffered Pb(Zr,Ti)O3 thin film

Smart Materials and Structures

Volumn 18, Issue 6, 2009, Pages

  Kobayashi, T ^a   Maeda, R ^a   Itoh, T ^a  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

AC VOLTAGE; ACTUATION VOLTAGES; DC BIAS; LOW SPEED; MICRO-CANTILEVERS; MICRO-SCANNERS; MICROELECTROMECHANICAL SYSTEMS; MICROFABRICATION PROCESS; MICROSCANNER; NONRESONANT; PB(ZR ,TI)O; PZT; ROTATION ANGLES; SILICON ON INSULATOR WAFERS; UNDER-ACTUATION;

COMPOSITE MICROMECHANICS; ELECTRIC POTENTIAL; FILM PREPARATION; LEAD; LEAD ALLOYS; LIGHT TRANSMISSION; MEMS; MICROANALYSIS; MICROELECTROMECHANICAL DEVICES; MICROFABRICATION; MICROMACHINING; MIRRORS; PIEZOELECTRIC TRANSDUCERS; PIEZOELECTRICITY; ROTATION; SCANNING; SEMICONDUCTING SILICON COMPOUNDS; SILICON OXIDES; THIN FILMS; ZIRCONIUM;

SILICON WAFERS;

EID: 68549111281     PISSN: 09641726     EISSN: 1361665X     Source Type: Journal    
DOI: 10.1088/0964-1726/18/6/065008     Document Type: Article

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