Application of sol-gel deposited thin PZT film for actuation of 1D and 2D scanners

Sensors and Actuators, A: Physical

Volumn 73, Issue 1-2, 1999, Pages 144-152

  Schroth, A ^a   Lee, C ^a   Matsumoto, S ^a   Maeda, R ^a  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; COMPUTER SIMULATION; CONTROLLABILITY; DEPOSITION; EIGENVALUES AND EIGENFUNCTIONS; FINITE ELEMENT METHOD; MICROSTRUCTURE; PHOSPHORUS COMPOUNDS; PIEZOELECTRICITY; SCANNING; SOL-GELS; THIN FILMS;

STIMULATION VOLTAGE;

MICROELECTROMECHANICAL DEVICES;

EID: 0033537528     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(98)00265-9     Document Type: Article

References (6)

1. O. Auciello, R. Ramesh (Eds.), Electroceramic thin films: Part I. Processing, MRS Bulletin, Special issue, June 1996.
2. Asada N., Matsuki H., Minami K., Esashi M. Silicon micromachined two-dimensional galvano optical scanner. IEEE Trans. Magnetics. 30:1994;4647-4649.
3. Y. Ohtuka, H. Nishikawa, T. Koumura, T. Hattori, 2-Dimensional optical scanner applying a torsional resonator with 2 degrees of freedom, Proc. MEMS '95, Amsterdam, Netherlands, 1995, pp. 306-309.
4. Lee C., Kawano S., Itoh T., Suga T. Characteristics of sol-gel derived PZT thin films with lead oxide cover layers and lead titanate interlayers. J. Mater. Sci. 31:1996;4559-4568.
5. Breng U., Gessner T., Kaufmann C., Kiehnscherf R., Markert J. Electrostatic micromechanic actuators. J. Micromech. Microeng. 2:1992;256-261.
6. A. Schroth, M. Ichiki, J. Akedo, M. Tanaka, R. Maeda, Properties and application of jet printed piezoelectric PZT film for actuation purposes, Proc. of the 1997 Intern. Symp. on Micromechatronics and Human Science, Nagoya, Japan, 5-8 October, 1997, pp. 67-72.