A MEMS VOA using electrothermal actuators

Journal of Lightwave Technology

Volumn 25, Issue 2, 2007, Pages 490-498

  Lee, Chengkuo ^a,b  

^a NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

^b INSTITUTE OF MICROELECTRONICS   (Singapore)

Author keywords

Electrothermal actuators; Microelectromechanical systems (MEMS); Reliability; Telecordia; Variable optical attenuators (VOAs); Wavelength division multiplexing

Indexed keywords

ACTUATORS; RELIABILITY; WAVEGUIDE ATTENUATORS; WAVELENGTH DIVISION MULTIPLEXING;

ATTENUATION; DYNAMIC FLUCTUATION; ELECTROTHERMAL ACTUATORS; VARIABLE OPTICAL ATTENUATORS;

MEMS;

EID: 34147156306     PISSN: 07338724     EISSN: None     Source Type: Journal    
DOI: 10.1109/JLT.2006.888257     Document Type: Article

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