Piezoelectrically driven microtransducer mass sensors

Integrated Ferroelectrics

Volumn 76, Issue , 2005, Pages 93-100

  Shin, Sanghun ^a   Lee, Nae Eung ^a   Park, Hyo Derk ^b   Park, Joon Shik ^b   Lee, Jaichan ^b  

^a Sungkyunkwan University   (South Korea)

^b Korea Electronic Technology Institute (KETI)   (South Korea)

Author keywords

Mass sensor; MEMS; Microtransducer; PZT; Resonant frequency

Indexed keywords

CAPACITORS; DIELECTRIC LOSSES; MICROELECTROMECHANICAL DEVICES; NATURAL FREQUENCIES; PIEZOELECTRIC TRANSDUCERS; SOL-GELS; THIN FILMS;

MASS SENSOR; MEMS; MICROTRANSDUCER;

SENSORS;

EID: 33645526898     PISSN: 10584587     EISSN: 16078489     Source Type: Conference Proceeding    
DOI: 10.1016/j.molcatb.2005.02.005     Document Type: Conference Paper

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