Variable optical attenuator using planar light attenuation scheme based on rotational and translational misalignment

Microsystem Technologies

Volumn 13, Issue 1, 2007, Pages 41-48

  Lee, Chengkuo ^a,b  

^a NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

^b INSTITUTE OF MICROELECTRONICS   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

DATA STORAGE EQUIPMENT; ELECTRIC RELAYS; LIGHT POLARIZATION; MICROELECTROMECHANICAL DEVICES; OPTICAL SWITCHES; REACTIVE ION ETCHING; ROTATION;

ELECTROTHERMAL ACTUATORS; OPTICAL ATTENUATOR; PLANAR LIGHT ATTENUATION SCHEME; TRANSIENT CHARACTERISTICS;

ELECTRIC ATTENUATORS;

EID: 33750300105     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-006-0260-6     Document Type: Article

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