메뉴 건너뛰기




Volumn 16, Issue 4, 2004, Pages 1044-1046

3-V driven pop-up micromirror for reflecting light toward out-of-plane direction for VOA applications

Author keywords

Actuator; Electrothermal; Microelectromechanical; Micromirror; Variable optical attenuator (VOA)

Indexed keywords

ACTUATORS; ATTENUATION; INSERTION LOSSES; LIGHT REFLECTION; MICROELECTROMECHANICAL DEVICES; OPTICAL DESIGN;

EID: 1942468643     PISSN: 10411135     EISSN: None     Source Type: Journal    
DOI: 10.1109/LPT.2004.824964     Document Type: Article
Times cited : (16)

References (12)
  • 1
    • 0035101710 scopus 로고    scopus 로고
    • MEMS technology for optical networking applications
    • Jan.
    • A. Neukermans and R. Ramaswami, "MEMS technology for optical networking applications," IEEE Commun. Mag., vol. 39, pp. 62-69, Jan. 2001.
    • (2001) IEEE Commun. Mag. , vol.39 , pp. 62-69
    • Neukermans, A.1    Ramaswami, R.2
  • 2
    • 0036252964 scopus 로고    scopus 로고
    • Opportunities and challenges for MEMS in lightwave communications
    • Jan./Feb.
    • L. Y. Lin and E. L. Goldstein, "Opportunities and challenges for MEMS in lightwave communications," IEEE J. Select. Topics Quantum Electron., vol. 8, pp. 163-172, Jan./Feb. 2002.
    • (2002) IEEE J. Select. Topics Quantum Electron. , vol.8 , pp. 163-172
    • Lin, L.Y.1    Goldstein, E.L.2
  • 4
    • 0033080136 scopus 로고    scopus 로고
    • A variable optical attenuator based on silicon micromechanics
    • Feb.
    • C. Marxer, P. Griss, and N. F. de Rooij, "A variable optical attenuator based on silicon micromechanics," IEEE Photon. Technol. Lett., vol. 11, pp. 233-235, Feb. 1999.
    • (1999) IEEE Photon. Technol. Lett. , vol.11 , pp. 233-234
    • Marxer, C.1    Griss, P.2    De Rooij, N.F.3
  • 5
    • 0037677923 scopus 로고    scopus 로고
    • Optical and mechanical models for a variable optical attenuator using a micromirror drawbridge
    • A. Q. Liu, X. M. Zhang, C. Lu, F. Wang, C. Lu, and Z. S. Liu, "Optical and mechanical models for a variable optical attenuator using a micromirror drawbridge," J. Micromech. Microeng., vol. 13, pp. 400-411, 2003.
    • (2003) J. Micromech.Microeng. , vol.13 , pp. 400-411
    • Liu, A.Q.1    Zhang, X.M.2    Lu, C.3    Wang, F.4    Lu, C.5    Liu, Z.S.6
  • 7
    • 0042638073 scopus 로고    scopus 로고
    • Electrothermal actuators fabricated in four-level planarized surface micromachined polycrystalline silicon
    • J. H. Comtois, M. A. Michalicek, and C. C. Barron, "Electrothermal actuators fabricated in four-level planarized surface micromachined polycrystalline silicon," Sens. Actuators, vol. A70, pp. 23-31, 1998.
    • (1998) Sens. Actuators , vol.A70 , pp. 23-31
    • Comtois, J.H.1    Michalicek, M.A.2    Barron, C.C.3
  • 8
    • 0033096840 scopus 로고    scopus 로고
    • Analysis and design of polysilicon thermal flexure actuator
    • Q.-A. Huang and N. K. S. Lee, "Analysis and design of polysilicon thermal flexure actuator," J. Micromech. Microeng., vol. 9, pp. 64-70, 1999.
    • (1999) J. Micromech. Microeng. , vol.9 , pp. 64-70
    • Huang, Q.-A.1    Lee, N.K.S.2
  • 9
    • 0037233677 scopus 로고    scopus 로고
    • Time and frequency response of two-arm micromachined thermal actuators
    • R. Hickey, D. Sameoto, T. Hubbard, and M. Kujath, "Time and frequency response of two-arm micromachined thermal actuators," J. Micromech. Microeng., vol. 13, pp. 40-46, 2003.
    • (2003) J. Micromech. Microeng. , vol.13 , pp. 40-46
    • Hickey, R.1    Sameoto, D.2    Hubbard, T.3    Kujath, M.4
  • 12
    • 0035362738 scopus 로고    scopus 로고
    • Surface-micromachined 2-D optical scanners with high-performance single-crsytalline silicon micromirrors
    • June
    • G.-D. J. Su, H. Toshiyoshi, and M. C. Wu, "Surface-micromachined 2-D optical scanners with high-performance single-crsytalline silicon micromirrors," IEEE Photon. Technol. Lett., vol. 13, pp. 606-608, June 2001.
    • (2001) IEEE Photon. Technol. Lett. , vol.13 , pp. 606-608
    • Su, G.-D.J.1    Toshiyoshi, H.2    Wu, M.C.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.