An electro-magnetic micromachined actuator monolithically integrated with a vertical shutter for variable optical attenuation

Journal of Micromechanics and Microengineering

Volumn 18, Issue 7, 2008, Pages

  Hung, Shao Hsuan ^a   Hsieh, Hsin Ta ^a   John Su, Guo Dung ^a  

^a NATIONAL TAIWAN UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

AMMONIUM COMPOUNDS; ELECTRIC CONVERTERS; ELECTROMAGNETISM; ELECTROSTATIC ACTUATORS; FIBER OPTICS; INTEGRATED OPTICS; MONOLITHIC INTEGRATED CIRCUITS; OPTICAL COLLIMATORS; OPTICAL DESIGN; OPTICAL INSTRUMENTS; SINGLE MODE FIBERS; WAVEGUIDE ATTENUATORS;

ANISOTROPIC WET ETCHING; ATTENUATION RANGE; DRIVING POWER; DRIVING VOLTAGES; DRIVING WAVE FORM; ELECTROMAGNETIC (EM); FIBER COLLIMATORS; LIGHTPATH (LP); MAGNETIC (CE); MECHANICAL SIMULATIONS; MICRO MIRRORS; MICROMACHINED; MONOLITHICALLY INTEGRATED; OPTICAL (PET) (OPET); OPTICAL ATTENUATION; REFLECTING SURFACES; RESPONSE TIME; SHARP EDGES; SINGLE MODES; TEST RESULTS; TETRA-METHYL AMMONIUM HYDROXIDE (TMAH); THEORETICAL CALCULATIONS; VARIABLE OPTICAL ATTENUATION (VOA); VARIABLE OPTICAL ATTENUATOR (VOA);

ELECTROMAGNETIC WAVE ATTENUATION;

EID: 47249129342     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/18/7/075003     Document Type: Article

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