Piezoelectrically pushed rotational micromirrors using detached PZT actuators for wide-angle optical switch applications

Journal of Micromechanics and Microengineering

Volumn 18, Issue 12, 2008, Pages

  Kim, Sung Jin ^a   Cho, Young Ho ^a   Nam, Hyo Jin ^b   Bu, Jong Uk ^b,c  

^a Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

^b LG Electronics Inc   (South Korea)

^c SenPlus Inc   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; BENDING (DEFORMATION); ELASTICITY; HYSTERESIS; NATURAL FREQUENCIES; PIEZOELECTRIC ACTUATORS; PIEZOELECTRIC TRANSDUCERS; SEMICONDUCTING LEAD COMPOUNDS; THERMOANALYSIS;

AXIS ROTATIONS; INITIAL CONTACTS; MICRO MIRRORS; PZT ACTUATORS; RESONANT FREQUENCIES; ROOM TEMPERATURES; ROTATIONAL ANGLES; ROTATIONAL MOTIONS; ROTATIONAL RESPONSES; SEVERE WEARS; SINUSOIDAL WAVES; STABLE OPERATIONS; STATIC FRICTIONS; TORSIONAL CONSTRAINTS; TORSIONAL MICROMIRROR; ZERO OFFSETS;

PIEZOELECTRIC MATERIALS;

EID: 58149344960     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/18/12/125022     Document Type: Article

References (10)

1. Laor H 1998 MEM mirrors application in optical cross-connect IEEE LEOS '98 pp II/21-22
2. Aksyuk V 2001 LambdaRouter Proc. IEEE Optical MEMS 2001 Invited Talk
3. Toshiyosh H, Piyawattanametha W, Chan C T and Wu M C 2001 Linearization of electrostatically actuated surface micromachined 2-D optical scanner J. Microelectromech. Syst. 10 205-14
4. Yee Y J, Bu J U, Ha M, Choi J, Oh H, Lee S and Nam H 2001 Fabrication and characterization of a PZT actuated micromirror with two-axis rotational motion for free space optics Proc. IEEE MEMS Workshop 2001 pp 317-20
5. Ikeda M, Totani H, Akiba A, Goto H, Matsumoto M and Yada T 1999 PZT thins-film actuator driven micro optical scanning sensor by 3D integration of optical and mechanical devices Proc. IEEE MEMS Workshop 99 pp 435-40
6. Kim S-J, Cho Y-H, Nam H-J and Bu J U 2003 Piezoelectrically pushed rotational micromirrors for wide angle optical switch applications Proc. IEEE MEMS Workshop 2003 pp 263-6
7. DeVoe D L and Pisano A P 1997 Modeling and optimal design of piezoelectric cantilever actuators J. Microelectromech. Syst. 6 266-70
8. Kim M-J and Cho Y-H 1999 Design, fabrication and characterization of piezoelectric multi-layer cantilever actuators for the minimum initial deflection Proc. 10th Int. Conf. Solid-State Sensors and Actuators (Transducers '99) pp 1758-61
9. Young W C Roark's Formulas for Stress and Strain 6th edn (New York: McGraw-Hill) p 348
10. DiCon Fiberoptics 2001 Measurement Products Catalog