Retro-reflection type MOEMS VOA

IEEE Photonics Technology Letters

Volumn 16, Issue 10, 2004, Pages 2290-2292

  Chen, Chihchung ^a   Lee, Chengkuo ^a   Yeh, J Andrew ^b  

^a ASIA PACIFIC MICROSYSTEMS INC   (Taiwan)

^b NATIONAL TSING HUA UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

FEEDBACK CONTROL; INSERTION LOSSES; LIGHT REFLECTION; MICROELECTROMECHANICAL DEVICES; MIRRORS; OPTICAL DESIGN; OPTICAL WAVEGUIDES; REACTIVE ION ETCHING; SCANNING ELECTRON MICROSCOPY; SILICON ON INSULATOR TECHNOLOGY;

ATTENUATE LIGHT INTENSITY; MICROMIRROR; RETROREFLECTION; VARIABLE OPTICAL ATTENUATORS;

WAVEGUIDE ATTENUATORS;

EID: 5444233089     PISSN: 10411135     EISSN: None     Source Type: Journal    
DOI: 10.1109/LPT.2004.833964     Document Type: Article

References (13)

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