New on-chip nanomechanical testing laboratory - Applications to aluminum and polysilicon thin films

Journal of Microelectromechanical Systems

Volumn 18, Issue 3, 2009, Pages 555-569

  Gravier, Sébastien ^a,b   Coulombier, Michaël ^c   Safi, Asmahan ^d   André, Nicolas ^c   Boé, Alexandre ^c   Raskin, Jean Pierre ^c   Pardoen, Thomas ^c  

^a UNIV GRENOBLE ALPES   (France)

^b Inst Univ de Technologie (IUT)   (France)

^c UNIVERSITÉ CATHOLIQUE DE LOUVAIN   (Belgium)

^d NORTHWESTERN UNIVERSITY   (United States)

Author keywords

Actuators; Materials; Mechanical properties; MEMS test structures; Microelectromechanical systems (MEMS); Nanomechanical testing; Plastics; Release; Size effect; Strain; Stress; Testing; Thin materials; Young's modulus

Indexed keywords

ACTUATORS; ALUMINUM; BRITTLE FRACTURE; CHARACTERIZATION; DUCTILE FRACTURE; ELASTIC MODULI; ELASTICITY; ELECTROMECHANICAL DEVICES; LABORATORIES; MATERIALS; MATERIALS PROPERTIES; MATERIALS TESTING; MECHANICAL ACTUATORS; MECHANICAL PROPERTIES; MECHANICAL TESTING; MEMS; MICROMECHANICS; PLASTICS; POLYCRYSTALLINE MATERIALS; POLYSILICON; STRAIN; STRAIN HARDENING; STRESSES; STRUCTURAL DESIGN; STRUCTURAL PROPERTIES; TESTING; YIELD STRESS;

MEMS TEST STRUCTURES; MICRO ELECTROMECHANICAL SYSTEM (MEMS); NANOMECHANICAL TESTING; RELEASE; SIZE EFFECTS; THIN MATERIALS;

THIN FILMS;

EID: 67549099084     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2009.2020380     Document Type: Article

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