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Volumn 49, Issue 13, 2001, Pages 2395-2403
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Constrained diffusional creep in UHV-produced copper thin films
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Author keywords
Aluminum; Copper; Creep; Mechanical properties; Thin films
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Indexed keywords
ALUMINUM COPPER ALLOYS;
ANNEALING;
COPPER;
CREEP;
DIFFUSION IN SOLIDS;
DISLOCATIONS (CRYSTALS);
OXIDATION;
PASSIVATION;
SEGREGATION (METALLOGRAPHY);
SILICON;
SPUTTERING;
STRESS RELAXATION;
THIN FILMS;
ULTRAHIGH VACUUM;
DIFFUSIONAL CREEP;
METALLIC FILMS;
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EID: 0035426516
PISSN: 13596454
EISSN: None
Source Type: Journal
DOI: 10.1016/S1359-6454(01)00168-9 Document Type: Article |
Times cited : (141)
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References (31)
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