A systematic approach to process selection in MEMS

Journal of Microelectromechanical Systems

Volumn 15, Issue 5, 2006, Pages 1039-1050

  Quinn, David J ^a   Spearing, S Mark ^a,b   Ashby, Mike F ^a   Fleck, Norman A ^c  

^a MASSACHUSETTS INSTITUTE OF TECHNOLOGY   (United States)

^b UNIVERSITY OF SOUTHAMPTON   (United Kingdom)

^c UNIVERSITY OF CAMBRIDGE   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

DATABASE SYSTEMS; MANUFACTURING DATA PROCESSING;

GENERIC ELEMENTS; PROCESS CHAINS; PROCESS SELECTION;

MICROELECTROMECHANICAL DEVICES;

EID: 33750014564     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2006.880292     Document Type: Review

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