Comparison of tensile and bulge tests for thin-film silicon nitride

Experimental Mechanics

Volumn 44, Issue 1, 2004, Pages 49-54

  Edwards, R L ^a   Coles, G ^b   Sharpe Jr , W N ^b  

^a JOHNS HOPKINS UNIVERSITY   (United States)

^b Johns Hopkins University   (United States)

Author keywords

Bulge tests; Poisson ratio; Silicon nitride; Strength; Tensile tests; Young's modulus

Indexed keywords

ELASTIC MODULI; STRENGTH OF MATERIALS; TENSILE TESTING; THIN FILMS;

UNIAXIAL TENSION;

SILICON NITRIDE;

SILICON NITRIDE; TENSILE STRENGTH;

EID: 1342308290     PISSN: 00144851     EISSN: None     Source Type: Journal    
DOI: 10.1007/BF02427976     Document Type: Article

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