Design and operation of a MEMS-based material testing system for nanomechanical characterization

Journal of Microelectromechanical Systems

Volumn 16, Issue 5, 2007, Pages 1219-1231

  Espinosa, Horacio D ^a   Zhu, Yong ^a   Moldovan, Nicolaie ^a  

^a Northwestern University   (United States)

Author keywords

Capacitive sensing; Carbon nanotubes; In situ microscopy; Load sensor; Nanomechanics; Nanostructure; Nanowires

Indexed keywords

ACTUATORS; CAPACITANCE MEASUREMENT; CARBON NANOTUBES; DEFORMATION; FORCE CONTROL; FRACTURE; NANOMECHANICS; NANOSTRUCTURES; TENSILE TESTING;

CAPACITIVE SENSING; LOAD SENSOR; MECHANICAL RESONANCE MEASUREMENTS;

MEMS;

EID: 35148879769     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2007.905739     Document Type: Article

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