An analysis of the membrane deflection experiment used in the investigation of mechanical properties of freestanding submicron thin films

International Journal of Solids and Structures

Volumn 43, Issue 11-12, 2006, Pages 3292-3305

  Peng, B ^a   Pugno, N ^a   Espinosa, H D ^a  

^a Northwestern University   (United States)

Author keywords

Fracture; MEMS materials; Nanoscale testing; Plasticity; Thin films

Indexed keywords

BENDING (DEFORMATION); FAILURE ANALYSIS; FRACTURE; MICROELECTROMECHANICAL DEVICES; PLASTICITY;

ELASTIC-BRITTLE MATERIALS; FAILURE MECHANISMS; MEMS MATERIALS; NANOSCALE TESTING;

THIN FILMS;

EID: 33646041919     PISSN: 00207683     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.ijsolstr.2005.07.052     Document Type: Article

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