Young's modulus, Poisson's ratio and failure properties of tetrahedral amorphous diamond-like carbon for MEMS devices

Journal of Micromechanics and Microengineering

Volumn 15, Issue 4, 2005, Pages 728-735

  Cho, Sungwoo ^a   Chasiotis, Ioannis ^b   Friedmann, Thomas A ^c   Sullivan, John P ^c  

^a University of Virginia   (United States)

^b UNIVERSITY OF ILLINOIS AT URBANA CHAMPAIGN   (United States)

^c SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS MATERIALS; ATOMIC FORCE MICROSCOPY; DIAMOND LIKE CARBON FILMS; ELASTIC MODULI; ELASTICITY; FAILURE (MECHANICAL); HYDROGEN; NANOSTRUCTURED MATERIALS; OPTICAL CORRELATION; POISSON RATIO; TENSILE STRENGTH;

DIGITAL IMAGE CORRELATION (DIC); DISPLACEMENT FIELDS; ELLIPTICAL PERFORATION; NANOELECTROMECHANICAL SYSTEM (NEMS);

MICROELECTROMECHANICAL DEVICES;

EID: 17444373545     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/15/4/009     Document Type: Article

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