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Acta Materialia

Volumn 50, Issue 1, 2002, Pages 23-38

Effects of the substrate on the determination of thin film mechanical properties by nanoindentation

(2) Saha, Ranjana a Nix, William D a

a Stanford University (United States)

Author keywords

Aluminum; Nanoindentation; Substrate effects; Thin films; Tungsten

Indexed keywords

ELASTIC MODULI; HARDNESS; METALLIC FILMS; STIFFNESS; TUNGSTEN;

NANOINDENTAION;

THIN FILMS;

EID: 0037039185 PISSN: 13596454 EISSN: None Source Type: Journal
DOI: 10.1016/S1359-6454(01)00328-7 Document Type: Article

Times cited : (1424)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.