메뉴 건너뛰기




Volumn 127, Issue 3, 2005, Pages 255-261

Multiscale mechanics in microelectronics: A paradigm in miniaturization

Author keywords

[No Author keywords available]

Indexed keywords

CONTINUUM MECHANICS; MECHANICAL PROPERTIES; MICROSTRUCTURE;

EID: 26844479242     PISSN: 10437398     EISSN: None     Source Type: Journal    
DOI: 10.1115/1.1939007     Document Type: Review
Times cited : (5)

References (40)
  • 1
  • 3
    • 77956668935 scopus 로고    scopus 로고
    • Strain gradient plasticity
    • Fleck, N. A., and Hutchinson, J. W., 1997, "Strain Gradient Plasticity," Adv. Appl. Mech., 33, pp. 295-361.
    • (1997) Adv. Appl. Mech. , vol.33 , pp. 295-361
    • Fleck, N.A.1    Hutchinson, J.W.2
  • 4
    • 0032500424 scopus 로고    scopus 로고
    • Size effects in materials due to microstructural and dimensional constraints: A comparative review
    • Arzt, E., 1998, "Size Effects in Materials Due to Microstructural and Dimensional Constraints: a Comparative Review," Acta Mater., 46(16), pp. 5611-5626.
    • (1998) Acta Mater. , vol.46 , Issue.16 , pp. 5611-5626
    • Arzt, E.1
  • 5
    • 0032158229 scopus 로고    scopus 로고
    • A microbend test method for measuring the plasticity length scale
    • Stölken, J. S., and Evans, A. G., 1998, "A Microbend Test Method for Measuring the Plasticity Length Scale," Acta Mater., 46(14), pp. 5109-5115.
    • (1998) Acta Mater. , vol.46 , Issue.14 , pp. 5109-5115
    • Stölken, J.S.1    Evans, A.G.2
  • 7
    • 0034291404 scopus 로고    scopus 로고
    • Indentation size effect: Large grained aluminum versus nanocrystalline aluminum-zirconium alloys
    • Elmustafa, A. A., Eastman, J. A., Rittner, M. N., Weertman, J. R., and Stone, D. S., 2000, "Indentation Size Effect: Large Grained Aluminum Versus Nanocrystalline Aluminum-Zirconium Alloys," Scr. Mater., 43(10), pp. 951-955.
    • (2000) Scr. Mater. , vol.43 , Issue.10 , pp. 951-955
    • Elmustafa, A.A.1    Eastman, J.A.2    Rittner, M.N.3    Weertman, J.R.4    Stone, D.S.5
  • 8
    • 0034468211 scopus 로고    scopus 로고
    • Evaluation of size effect on mechanical properties of single crystal silicon by nanoscale bending test using afm
    • Takahiro, N., Yoshitada, I., and Takeshi, T., 2000, "Evaluation of Size Effect on Mechanical Properties of Single Crystal Silicon by Nanoscale Bending Test Using Afm," J. Microelectromech. Syst., 9(4), pp. 450-459.
    • (2000) J. Microelectromech. Syst. , vol.9 , Issue.4 , pp. 450-459
    • Takahiro, N.1    Yoshitada, I.2    Takeshi, T.3
  • 9
    • 0035927973 scopus 로고    scopus 로고
    • Specimen size effect on mechanical properties of polysilicon microcantilever beams measured by deflection using a nanoindenter
    • Ding, J. N., Meng, Y. G., and Wen, S. Z., 2001, "Specimen Size Effect on Mechanical Properties of Polysilicon Microcantilever Beams Measured by Deflection Using a Nanoindenter," Mater. Sci. Eng., B, 83(1-3), pp. 42-47.
    • (2001) Mater. Sci. Eng., B , vol.83 , Issue.1-3 , pp. 42-47
    • Ding, J.N.1    Meng, Y.G.2    Wen, S.Z.3
  • 10
    • 0035703355 scopus 로고    scopus 로고
    • The 'size effect' on the stress-strain, fatigue, and fracture properties of thin metallic foils
    • Klein, M., Hadrboletz, A., Weiss, B., and Khatibi, G., 2001, "The 'Size Effect' on the Stress-Strain, Fatigue, and Fracture Properties of Thin Metallic Foils," Mater. Sci. Eng., A, 319-321, pp. 924-928.
    • (2001) Mater. Sci. Eng., A , vol.319-321 , pp. 924-928
    • Klein, M.1    Hadrboletz, A.2    Weiss, B.3    Khatibi, G.4
  • 11
    • 0035906788 scopus 로고    scopus 로고
    • Size effects in properties of nanomaterials
    • Andrievski, R. A., and Glezer, A. M., 2001, "Size Effects in Properties of Nanomaterials," Scr. Mater., 44(8-9), pp. 1621-1624.
    • (2001) Scr. Mater. , vol.44 , Issue.8-9 , pp. 1621-1624
    • Andrievski, R.A.1    Glezer, A.M.2
  • 12
    • 0035879872 scopus 로고    scopus 로고
    • Intrinsic size effects in plasticity by dislocation glide
    • Gil Sevillano, J., Ocaa Arizcorreta, I., and Kubin, L. P., 2001, "Intrinsic Size Effects in Plasticity by Dislocation Glide," Mater. Sci. Eng., A, 309-310, pp. 393-405.
    • (2001) Mater. Sci. Eng., A , vol.309-310 , pp. 393-405
    • Gil Sevillano, J.1    Ocaa Arizcorreta, I.2    Kubin, L.P.3
  • 13
    • 0037164197 scopus 로고    scopus 로고
    • Size effect and asymptotic matching approximations in strain-gradient theories of micro-scale plasticity
    • Bažant, Z. P., and Guo, Z., 2002, "Size Effect and Asymptotic Matching Approximations in Strain-Gradient Theories of Micro-Scale Plasticity," Int. J. Solids Struct., 39, pp. 5633-5657.
    • (2002) Int. J. Solids Struct. , vol.39 , pp. 5633-5657
    • Bažant, Z.P.1    Guo, Z.2
  • 14
    • 0035801955 scopus 로고    scopus 로고
    • Smaller is softer: An inverse size effect in a cast aluminum alloy
    • Benzerga, A. A., Hong, S. S., Kim, K. S., Needleman, A., and Van der Giessen, E., 2001, "Smaller is Softer: An Inverse Size Effect in a Cast Aluminum Alloy," Acta Mater., 49(15), pp. 3071-3083.
    • (2001) Acta Mater. , vol.49 , Issue.15 , pp. 3071-3083
    • Benzerga, A.A.1    Hong, S.S.2    Kim, K.S.3    Needleman, A.4    Van Der Giessen, E.5
  • 15
    • 0035465988 scopus 로고    scopus 로고
    • Gradient-enhanced computational homogenization for the micro-macro scale transition
    • Geers, M. G. D., Kouznetsova, V., and Brekelmans, W. A. M., 2001, "Gradient-Enhanced Computational Homogenization for the Micro-Macro Scale Transition," Journal De Physique IV, 11(5), pp. 145-152.
    • (2001) Journal de Physique IV , vol.11 , Issue.5 , pp. 145-152
    • Geers, M.G.D.1    Kouznetsova, V.2    Brekelmans, W.A.M.3
  • 16
    • 0037143110 scopus 로고    scopus 로고
    • Multi-scale constitutive modeling of heterogeneous materials with a gradient-enhanced computational homogenization scheme
    • Kouznetsova, V., Geers, M. G. D., and Brekelmans, W. A. M., 2002, "Multi-Scale Constitutive Modeling of Heterogeneous Materials With a Gradient-Enhanced Computational Homogenization Scheme," Int. J. Numer. Methods Eng., 54, pp. 1235-1260.
    • (2002) Int. J. Numer. Methods Eng. , vol.54 , pp. 1235-1260
    • Kouznetsova, V.1    Geers, M.G.D.2    Brekelmans, W.A.M.3
  • 18
    • 0024749162 scopus 로고
    • On the validity of the hall-petch relationship in nanocrystalline materials
    • Chokshi, A. H., Rosen, A., Karch, J., and Gleiter, H., 1989, "On the Validity of the Hall-Petch Relationship in Nanocrystalline Materials," Scr. Metall., 23(10), pp. 1679-1684.
    • (1989) Scr. Metall. , vol.23 , Issue.10 , pp. 1679-1684
    • Chokshi, A.H.1    Rosen, A.2    Karch, J.3    Gleiter, H.4
  • 19
    • 0028201653 scopus 로고
    • Particle reinforced aluminum and magnesium matrix composites
    • Lloyd, D. J., 1994, "Particle Reinforced Aluminum and Magnesium Matrix Composites," Int. Mater. Rev., 39, pp. 1-23.
    • (1994) Int. Mater. Rev. , vol.39 , pp. 1-23
    • Lloyd, D.J.1
  • 20
    • 0029289877 scopus 로고
    • Size dependent hardness of silver single crystals
    • Ma, Q., and Clarke, D. R., 1994, "Size Dependent Hardness of Silver Single Crystals," J. Mater. Res., 10(4), pp. 853-863.
    • (1994) J. Mater. Res. , vol.10 , Issue.4 , pp. 853-863
    • Ma, Q.1    Clarke, D.R.2
  • 21
    • 0242717850 scopus 로고    scopus 로고
    • Determination of indenter tip geometry and indentation contact area for depth-sensing indentation experiments
    • McElhaney, K. W., Vlassak, J. J., and Nix, W. D., 1998, "Determination of Indenter Tip Geometry and Indentation Contact Area for Depth-Sensing Indentation Experiments," J. Mater. Res., 13, pp. 1300-1306.
    • (1998) J. Mater. Res. , vol.13 , pp. 1300-1306
    • McElhaney, K.W.1    Vlassak, J.J.2    Nix, W.D.3
  • 22
    • 0038785610 scopus 로고    scopus 로고
    • Elastic-plastic characterization of thin-films using nanoindentation technique
    • Shan, Z., and Sitaraman, S. K., 2003, "Elastic-Plastic Characterization of Thin-Films Using Nanoindentation Technique," Thin Solid Films, 437, pp. 176-181.
    • (2003) Thin Solid Films , vol.437 , pp. 176-181
    • Shan, Z.1    Sitaraman, S.K.2
  • 23
    • 0024766321 scopus 로고
    • Mechanical properties of thin films
    • Nix, W. D., 1989, "Mechanical Properties of Thin Films," Metall. Trans. A, 20A, pp. 2217-2245.
    • (1989) Metall. Trans. A , vol.20 A , pp. 2217-2245
    • Nix, W.D.1
  • 24
    • 0021502102 scopus 로고
    • On the microstructural origin of certain inelastic models
    • Aifantis, E. C., 1984, "On the Microstructural Origin of Certain Inelastic Models," ASME J. Eng. Mater. Technol., 106, pp. 326-330.
    • (1984) ASME J. Eng. Mater. Technol. , vol.106 , pp. 326-330
    • Aifantis, E.C.1
  • 25
    • 0030269548 scopus 로고    scopus 로고
    • Crack tip fields in strain gradient plasticity
    • Xia, Z. C., and Hutchinson, J. W., 1996, "Crack Tip Fields in Strain Gradient Plasticity." J. Mech. Phys. Solids, 44, pp. 1621-1648.
    • (1996) J. Mech. Phys. Solids , vol.44 , pp. 1621-1648
    • Xia, Z.C.1    Hutchinson, J.W.2
  • 26
    • 0029730880 scopus 로고    scopus 로고
    • Finite element method for gradient plasticity at large strains
    • Li, X., and Cescotto, S., 1996, "Finite Element Method for Gradient Plasticity at Large Strains," Int. J. Numer. Methods Eng., 39, pp. 619-633.
    • (1996) Int. J. Numer. Methods Eng. , vol.39 , pp. 619-633
    • Li, X.1    Cescotto, S.2
  • 27
    • 0030195575 scopus 로고    scopus 로고
    • Some novel developments in finite element procedures for gradient-dependent plasticity
    • de Borst, R., and Pamin, J., 1996, "Some Novel Developments in Finite Element Procedures for Gradient-Dependent Plasticity," Int. J. Numer. Methods Eng., 39, pp. 2477-2505.
    • (1996) Int. J. Numer. Methods Eng. , vol.39 , pp. 2477-2505
    • De Borst, R.1    Pamin, J.2
  • 28
    • 0031102222 scopus 로고    scopus 로고
    • Mixed mode near tip fields for cracks in materials with strain gradient effects
    • Haung, Y., Zhang, L., Guo, T. F., and Hwang, K.-C., 1997, "Mixed Mode Near Tip Fields for Cracks in Materials With Strain Gradient Effects," J. Mech. Phys. Solids, 45, pp. 439-465.
    • (1997) J. Mech. Phys. Solids , vol.45 , pp. 439-465
    • Haung, Y.1    Zhang, L.2    Guo, T.F.3    Hwang, K.-C.4
  • 29
    • 0033737940 scopus 로고    scopus 로고
    • Incompatibility and crystal plasticity
    • Acharya, A., and Bassani, J. L., 2000, "Incompatibility and Crystal Plasticity," J. Mech. Phys. Solids, 48, pp. 1565-1595.
    • (2000) J. Mech. Phys. Solids , vol.48 , pp. 1565-1595
    • Acharya, A.1    Bassani, J.L.2
  • 30
    • 0034296233 scopus 로고    scopus 로고
    • A new hardening law for strain gradient plasticity
    • Chen, S. H., and Wang, T. C., 2000, "A New Hardening Law for Strain Gradient Plasticity," Acta Metall., 48, pp. 3997-4005.
    • (2000) Acta Metall. , vol.48 , pp. 3997-4005
    • Chen, S.H.1    Wang, T.C.2
  • 31
    • 0035310825 scopus 로고    scopus 로고
    • Taylor-based nonlocal theory of plasticity
    • Gao, H., and Huang, Y., 2001, "Taylor-Based Nonlocal Theory of Plasticity," Int. J. Solids Struct., 38, pp. 2615-2637.
    • (2001) Int. J. Solids Struct. , vol.38 , pp. 2615-2637
    • Gao, H.1    Huang, Y.2
  • 32
    • 0035479791 scopus 로고    scopus 로고
    • A reformulation of strain gradient plasticity
    • Fleck, N. A., and Hutchinson, J. W., 2001, "A Reformulation of Strain Gradient Plasticity," J. Mech. Phys. Solids, 49, pp. 2245-2271.
    • (2001) J. Mech. Phys. Solids , vol.49 , pp. 2245-2271
    • Fleck, N.A.1    Hutchinson, J.W.2
  • 33
    • 0034746525 scopus 로고    scopus 로고
    • Plastic flow in a composite: A comparison of nonlocal continuum and discrete dislocation predictions
    • Bassani, J. L., Needleman, A., and van der Giessen, E., 2001, "Plastic Flow in a Composite: A Comparison of Nonlocal Continuum and Discrete Dislocation Predictions," Int. J. Solids Struct., 38, pp. 833-853.
    • (2001) Int. J. Solids Struct. , vol.38 , pp. 833-853
    • Bassani, J.L.1    Needleman, A.2    Van Der Giessen, E.3
  • 34
    • 0032026085 scopus 로고    scopus 로고
    • Prediction of the mechanical behavior of non-linear systems by multi-level finite element modeling
    • Smit, R. J. M., Brekelmans, W. A. M., and Meijer, H. E. H., 1998, "Prediction of the Mechanical Behavior of Non-linear Systems by Multi-Level Finite Element Modeling," Comput. Methods Appl. Mech. Eng., 155, pp. 181-192.
    • (1998) Comput. Methods Appl. Mech. Eng. , vol.155 , pp. 181-192
    • Smit, R.J.M.1    Brekelmans, W.A.M.2    Meijer, H.E.H.3
  • 35
    • 0033116492 scopus 로고    scopus 로고
    • Computational homogenization analysis in finite plasticity, simulation of texture development in polycrystalline materials
    • Miehe, C., Schröder, J., and Schotte, J., 1999, "Computational Homogenization Analysis in Finite Plasticity, Simulation of Texture Development in Polycrystalline Materials," Comput. Methods Appl. Mech. Eng., 171, pp. 387-418.
    • (1999) Comput. Methods Appl. Mech. Eng. , vol.171 , pp. 387-418
    • Miehe, C.1    Schröder, J.2    Schotte, J.3
  • 36
    • 0033226004 scopus 로고    scopus 로고
    • A microstructure based numerical method for constitutive modeling of composite and porous materials
    • Lee, K., and Ghosh, S., 1999, "A Microstructure Based Numerical Method for Constitutive Modeling of Composite and Porous Materials," Mater. Sci. Eng., 272, pp. 120-133.
    • (1999) Mater. Sci. Eng. , vol.272 , pp. 120-133
    • Lee, K.1    Ghosh, S.2
  • 37
    • 0034677856 scopus 로고    scopus 로고
    • 2 multiscale approach for modeling the elasto-viscoplastic behaviour of long fibre SiC/Ti composite materials
    • 2 Multiscale Approach for Modeling the Elasto-Viscoplastic Behaviour of Long Fibre SiC/Ti Composite Materials," Comput. Methods Appl. Mech. Eng., 183, pp. 309-330.
    • (2000) Comput. Methods Appl. Mech. Eng. , vol.183 , pp. 309-330
    • Feyel, F.1    Chaboche, J.-L.2
  • 38
    • 0035088146 scopus 로고    scopus 로고
    • An approach to micro-macro modeling of heterogeneous materials
    • Kouznetsova, V., Brekelmans, W. A. M., and Baaijens, F. P. T., 2001. "An Approach to Micro-Macro Modeling of Heterogeneous Materials," Comput. Mech., 7(1), pp. 37-48.
    • (2001) Comput. Mech. , vol.7 , Issue.1 , pp. 37-48
    • Kouznetsova, V.1    Brekelmans, W.A.M.2    Baaijens, F.P.T.3
  • 39
    • 0037146840 scopus 로고    scopus 로고
    • Strain-driven homogenization of inelastic microstructures and composites based on an incremental variational formulation
    • Miehe, C., 2002, "Strain-Driven Homogenization of Inelastic Microstructures and Composites Based on an Incremental Variational Formulation," Int. J. Numer. Methods Eng., 55, pp. 1285-1322.
    • (2002) Int. J. Numer. Methods Eng. , vol.55 , pp. 1285-1322
    • Miehe, C.1
  • 40
    • 0035371582 scopus 로고    scopus 로고
    • Boundary layers in constrained plastic flow: Comparison of nonlocal and discrete dislocation plasticity
    • Shu, J. Y., Fleck, N. A., van der Giessen, E., and Needleman, A., 2001, "Boundary Layers in Constrained Plastic Flow: Comparison of Nonlocal and Discrete Dislocation Plasticity," J. Mech. Phys. Solids, 49, pp. 1361-1395.
    • (2001) J. Mech. Phys. Solids , vol.49 , pp. 1361-1395
    • Shu, J.Y.1    Fleck, N.A.2    Van Der Giessen, E.3    Needleman, A.4


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.