SCOPUS 정보 검색 플랫폼

Materials Science and Engineering: A

Volumn 319-321, Issue , 2001, Pages 898-901

Solt films on hard substrates - Nanoindentation of tungsten films on sapphire substrates

(2) Saha, R a Nix, W D a

a Stanford University (United States)

Author keywords

Hardness; Nanoindentation; Pile up; Thin films; Tungsten

Indexed keywords

ATOMIC FORCE MICROSCOPY; ELASTIC MODULI; HARDNESS; INDENTATION; SAPPHIRE; SINGLE CRYSTALS; SPUTTER DEPOSITION; STIFFNESS; SUBSTRATES; THIN FILMS; TUNGSTEN;

NANOINDENTATION; SOFT FILMS;

METALLIC FILMS;

FILM; HARDNESS; SAPPHIRE; TUNGSTEN;

EID: 0035699007 PISSN: 09215093 EISSN: None Source Type: Journal
DOI: 10.1016/S0921-5093(01)01076-0 Document Type: Article

Times cited : (114)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.