Plastic deformation of freestanding thin films: Experiments and modeling

Journal of the Mechanics and Physics of Solids

Volumn 54, Issue 10, 2006, Pages 2089-2110

  Nicola, L ^a   Xiang, Y ^b   Vlassak, J J ^b   Van der Giessen, E ^c   Needleman, A ^a  

^a Brown University   (United States)

^b HARVARD UNIVERSITY   (United States)

^c UNIVERSITY OF GRONINGEN   (Netherlands)

Author keywords

Bauschinger effect; Computer simulation; Dislocations; Size effects; Thin films

Indexed keywords

COMPUTATIONAL METHODS; COMPUTER SIMULATION; COPPER; DISLOCATIONS (CRYSTALS); ELECTROPLATING; GRAIN GROWTH; HYSTERESIS; PASSIVATION; PLASTIC DEFORMATION; STRESS ANALYSIS;

BAUSCHINGER EFFECT; ELASTIC SOLIDS; FREESTANDING THIN FILMS; SIZE EFFECTS;

THIN FILMS;

EID: 33746360914     PISSN: 00225096     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jmps.2006.04.005     Document Type: Article

References (42)

1. Acharya A., and Bassani J.L. Lattice incompatibility and a gradient theory of crystal plasticity. J. Mech. Phys. Solids 48 (2000) 1565-1595
2. Benzerga A.A., Bréchet Y., Needleman A., and Van der Giessen E. Incorporating three-dimensional mechanisms into two-dimensional dislocation dynamics. Modelling Simul. Mater. Sci. Eng. 12 (2004) 159-196
3. Cleveringa H.H.M., Van der Giessen E., and Needleman A. A discrete dislocation analysis of bending. Int. J. Plasticity 15 (1999) 837-868
4. Dehm G., Balk T.J., Edongué H., and Arzt E. Small-scale plasticity in thin Cu and Al films. Microelectron. Eng. 70 (2003) 412-424
5. Deshpande V.S., Needleman A., and Van der Giessen E. Plasticity size effects in tension and compression of single crystals. J. Mech. Phys. Solids 53 (2005) 2661-2691
6. Dimiduk D.M., Uchic M.D., and Parathasarathy T.A. Size-affected single-slip behavior of pure nickel microcrystals. Acta Mater. 53 15 (2005) 4065-4077
7. Espinosa H.D., Prorok B.C., and Fischer M. A methodology for determining mechanical properties of freestanding thin films and MEMS materials. J. Mech. Phys. Solids 51 (2003) 47-67
8. Espinosa H.D., Prorok B.C., and Peng B. Plasticity size effects in free-standing submicron polycrystalline FCC films subjected to pure tension. J. Mech. Phys. Solids 52 (2004) 667-689
9. Fleck N.A., and Hutchinson J.W. A reformulation of strain gradient plasticity. J. Mech. Phys. Solids 49 (2001) 2245-2271
10. Fleck N.A., Muller G.M., Ashby M.F., and Hutchinson J.W. Strain gradient plasticity: theory and experiment. Acta Metall. Mater. 42 (1994) 475-487
11. Florando J.N., and Nix W.D. A microbeam bending method for studying stress-strain relations for metal thin films on silicon substrates. J. Mech. Phys. Solids 53 (2005) 619-638
12. Gao H., Huang Y., Nix W.D., and Hutchinson J.W. Mechanism-based strain gradient plasticity. J. Mech. Phys. Solids 47 (1999) 1239-1263
13. Ghoniem N.M., and Han X. Dislocation motion in anisotropic multilayer materials. Philos. Mag. 85 (2005) 2809-2830
14. Greer, J.R., Oliver, W.C., Nix, W.D., 2005. Size dependence of mechanical properties of gold at the micron scale in the absence of strain gradients. Acta Mater. 53, 1821-1830, erratum Acta Mater. 54, 1705.
15. Groh S., Devincre B., Kubin L.P., Roos A., Feyel F., and Chaboche J.-L. Dislocations and elastic anisotropy in heteroepitaxial metallic thin films. Philos. Mag. Lett. 83 (2003) 303-313
16. Gurtin M.E. A gradient theory of single-crystal viscoplasticity that accounts for geometrically necessary dislocations. J. Mech. Phys. Solids 50 (2002) 5-32
17. Haque M.A., and Saif M.T.A. Strain gradient effect in nanoscale thin films. Acta Mater. 51 (2003) 3053-3061
18. Hartmaier A., Buehler M.J., and Gao H. Two-dimensional discrete dislocation models of deformation in polycrystalline thin metal films on substrates. Mater. Sci. Eng. A 400 (2005) 260-263
19. Hommel M., and Kraft O. Deformation behavior of thin copper films on deformable substrates. Acta Mater. 49 (2001) 3935-3947
20. Hutchinson, J.W., 2001. Strain gradient plasticity theory revisited. Materials Science for the 21st Century, vol. A. Society of Materials Science, Japan, pp. 307-315.
21. Kubin L.P., Canova G., Condat M., Devincre B., Pontikis V., and Bréchet Y. Dislocation microstructures and plastic flow: a 3D simulation. Solid State Phenom. 23 (1992) 455-472
22. Lou J., Shrotriya P., Buchheit P., Yang D., and Soboyejo W.O. An investigation of the effects of thickness on mechanical properties of LIGA nickel MEMS structures. J. Mater. Sci. 38 (2003) 4137-4143
23. Ma Q., and Clark D.R. Size dependent hardness of silver single crystals. J. Mater. Res. 10 (1995) 853-863
24. Nicola L., Van der Giessen E., and Needleman A. Discrete dislocation analysis of size effects in thin films. J. Appl. Phys. 93 (2003) 5920-5928
25. Nicola L., Van der Giessen E., and Needleman A. Size effects in polycrystalline thin films analyzed by discrete dislocation plasticity. Thin Solid Films 479 (2005) 329-338
26. Nicola L., Van der Giessen E., and Gurtin M.E. Effect of defect energy on strain-gradient predictions of confined single-crystal plasticity. J. Mech. Phys. Solids 53 (2005) 1280-1294
27. Nicola L., Van der Giessen E., and Needleman A. Two hardening mechanisms in single crystal thin films studied by discrete dislocation plasticity. Philos. Mag. A 85 (2005) 1507-1518
28. Pant P., Schwarz K.W., and Baker S.P. Dislocation interactions in thin FCC metal films. Acta Mater. 51 (2003) 3243-3258
29. Phillips M.A., Spolenak R., Tamura N., Brown W.L., MacDowell A.A., Celestre R.S., Padmore H.A., Batterman B.W., Arzt E., and Patel J.R. X-ray microdiffraction: local stress distributions in polycrystalline and epitaxial thin films. Microelectron. Eng. 75 (2004) 117-126
30. Shen Y.-L., Suresh S., He M.Y., Bagchi A., Kienzle O., Rühle M., and Evans A.G. Stress evolution in passivated thin films of Cu on silica substrates. J. Mater. Res. 13 (1998) 1928-1937
31. Shu J.Y., Fleck N.A., Van der Giessen E., and Needleman A. Boundary layers in constrained plastic flow: comparison of nonlocal and discrete dislocation plasticity. J. Mech. Phys. Solids 49 (2001) 1361-1395
32. Stölken, J.S., Evans, A.G., 1998. A microbend test method for measuring the plasticity length scale. Acta Mater. 46, 5109-5115.
33. Uchic M.D., Dimiduk D.M., Florando J.N., and Nix W.D. Sample dimensions influence strength and crystal plasticity. Science 305 5686 (2004) 986-989
34. Van der Giessen E., and Needleman A. Discrete dislocation plasticity: a simple planar model. Modelling Simul. Mater. Sci. Eng. 3 (1995) 689-735
35. Vlassak J.J., and Nix W.D. A new bulge test technique for the determination of Young's modulus and Poisson's ratio of thin films. J. Mater. Res. 7 (1992) 3242-3249
36. Von Blanckenhagen B., Arzt E., and Gumbsch P. Discrete dislocation simulation of plastic deformation in metal thin films. Acta Mater. 52 (2004) 773-784
37. Xiang Y., and Vlassak J.J. Bauschinger effect in thin metal films. Scr. Mater. 53 (2005) 177-182
38. Xiang, Y., Vlassak, J.J., 2005b. Length-scale and Bauschinger effects in freestanding thin films, submitted for publication.
39. Xiang, Y., Tsui, T.Y., Vlassak, J.J., 2006. The mechanical properties of freestanding electroplated Cu thin films. J. Mater. Res. 21 (6), in press.
40. Xiang Y., Chen X., and Vlassak J.J. The mechanical properties of electroplated Cu thin films measured by means of the bulge test technique. Mater. Res. Soc. Symp. Proc. 695 (2002) 189-194
41. Xiang, Y., Vlassak, J.J., Perez-Prado, M.T., Tsui, T.Y., McKerrow, A.J., 2004. The effects of passivation layer and film thickness on the mechanical behavior of freestanding electroplated Cu thin films with constant microstructure. Mater. Res. Soc. Symp. Proc. 795, 417-422.
42. Xiang Y., Chen X., and Vlassak J.J. The plane-strain bulge test for thin films. J. Mater. Res. 20 (2005) 2360-2370