A reliable test key for thin film mechanical properties characterization

TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers

Volumn 1, Issue , 2003, Pages 452-455

  Tsai, Hsin Chang ^a   Tsai, J M L ^a   Chang, Heng Chung ^a   Fang, Weileun ^a  

^a NATIONAL TSING HUA UNIVERSITY   (Taiwan)

Author keywords

Conductive films; Frequency measurement; Material properties; Materials testing; Mechanical factors; Mechanical variables measurement; Micromachining; Resonance; Sputtering; Transistors

Indexed keywords

ACTUATORS; CHARACTERIZATION; COMPOSITE MICROMECHANICS; CONDUCTIVE FILMS; CONDUCTIVE MATERIALS; ELASTIC MODULI; FILMS; MATERIALS PROPERTIES; MATERIALS TESTING; MECHANICAL PROPERTIES; MECHANICAL VARIABLES MEASUREMENT; MICROMACHINING; MICROSYSTEMS; RESONANCE; SILICON OXIDES; SOLID-STATE SENSORS; SPUTTERING; TRANSDUCERS; TRANSISTORS;

BULK- MICROMACHINING; FREQUENCY MEASUREMENTS; MECHANICAL FACTORS; MICROMACHINED CANTILEVER; SURFACE PROCESS; THIN FILM MATERIAL; TORSIONAL MODES;

THIN FILMS;

EID: 84944715950     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2003.1215351     Document Type: Conference Paper

References (8)

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