Pull-in behavior of electrostatically actuated multistable microstructures

2007 Proceedings of the ASME International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, DETC2007

Volumn 3 PART B, Issue , 2008, Pages 759-768

  Krylov, Slava ^a   Seretensky, Shimon ^a   Schreiber, David ^a  

^a TEL AVIV UNIVERSITY   (Israel)

Author keywords

[No Author keywords available]

Indexed keywords

(LIQUID + LIQUID) EQUILIBRIUM; (MIN ,MAX ,+) FUNCTIONS; ACTUATING FORCES; ACTUATION VOLTAGES; ACTUATOR DESIGN; BI-STABILITY; BIFURCATION DIAGRAMS; BIFURCATION POINTS; CRITICAL POINTS (CP); CURVED BEAMS; DEEP REACTIVE ION ETCHING (DRIV); DEFLECTION (OVALIZATION); DESIGN THEORY AND METHODOLOGY; EIGEN-MODES; ELECTRO MECHANICAL; ELECTROMECHANICAL BEHAVIORS; EULER BERNOULLI BEAMS; GEOMETRICALLY NON-LINEAR; GOVERNING EQUATIONS; INSTABILITY POINTS; INTERNATIONAL CONFERENCES; INTERNATIONAL DESIGNS; MICRO AND NANO SYSTEMS; MICRO BEAMS; MICRO ELECTRO MECHANICAL SYSTEMS (MEMS); MODEL RESULTS; MULTI-STABLE; MULTIPLE EQUILIBRIUM; MULTISTABILITY; NON-LINEARITIES; PULL-IN; PULL-IN INSTABILITY; RAYLEIGH-RITZ METHODS; SECOND ORDER PERTURBATION; SHALLOW ARCHES; SINGLE CRYSTAL SILICON (SCS); SNAP-THROUGH; STABLE STATES; TECHNICAL CONFERENCES;

ARCHITECTURAL DESIGN; ATMOSPHERIC ELECTRICITY; BEAMS AND GIRDERS; BIFURCATION (MATHEMATICS); BUCKLING; COMPUTER NETWORKS; COMPUTERS; CONTROL NONLINEARITIES; CONTROL THEORY; DEFLECTION (STRUCTURES); ELECTRIC CURRENTS; ELECTRIC POTENTIAL; ELECTROACUPUNCTURE; ELECTROMECHANICAL DEVICES; ELECTROSTATIC ACTUATORS; ELECTROSTATICS; ENGINEERING; EQUATIONS OF STATE; EULER EQUATIONS; FARM BUILDINGS; FUNCTION EVALUATION; INFORMATION SYSTEMS; LAPLACE EQUATION; LITHOGRAPHY; MATHEMATICAL MODELS; MECHANICAL STABILITY; MICROFLUIDICS; MICROSENSORS; MODAL ANALYSIS; NANOSTRUCTURED MATERIALS; NANOSYSTEMS; NONLINEAR EQUATIONS; NUMERICAL METHODS; OPTICAL BISTABILITY; SILICON; SILICON WAFERS; SINGLE CRYSTALS; TECHNOLOGY;

REACTIVE ION ETCHING;

EID: 44849104228     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1115/DETC2007-35552     Document Type: Conference Paper

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