Empirical and theoretical characterisation of electrostatically driven MEMS structures with stress gradients

Sensors and Actuators, A: Physical

Volumn 123-124, Issue , 2005, Pages 555-562

  De Coster, J ^a   Tilmans, H A C ^b   Den Toonder, J M J ^c   Van Beek, J T M ^c   Rijks, Th G S M ^c   Steeneken, P G ^c   Puers, R ^a  

^a UNIVERSITY OF LEUVEN   (Belgium)

^b IMEC   (Belgium)

^c PHILIPS RESEARCH LABORATORIES   (Netherlands)

Author keywords

Electrostatic pull in; MEMS actuators; Stress gradient; Thin film testing

Indexed keywords

ACTUATORS; COMPUTER SIMULATION; ELECTRIC POTENTIAL; ELECTROSTATICS; PROFILOMETRY;

ELECTROSTATIC SWITCHING BEHAVIOR; MECHANICAL CHARACTERIZATION; MECHANICAL MEASUREMENTS; PULL-IN VOLTAGE;

MICROELECTROMECHANICAL DEVICES;

EID: 24944546925     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2005.03.075     Document Type: Conference Paper

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