A generalized model of electrically actuated, microbeam-based MEMS devices

Proceedings of the ASME Design Engineering Technical Conference

Volumn 5 C, Issue , 2003, Pages 1837-1842

  Abdel Rahman, Eihab M ^a   Emam, Samir A ^a   Nayfeh, Ali H ^a  

^a VIRGINIA POLYTECHNIC INSTITUTE AND STATE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BOUNDARY VALUE PROBLEMS; CAPACITANCE; EIGENVALUES AND EIGENFUNCTIONS; ELASTIC MODULI; ELECTRIC LOADS; ELECTROSTATICS; FINITE ELEMENT METHOD; NATURAL FREQUENCIES; NUMERICAL ANALYSIS; PARTIAL DIFFERENTIAL EQUATIONS; PROBLEM SOLVING;

MICROBEAMS; MID-PLANE STRETCHING;

MICROELECTROMECHANICAL DEVICES;

EID: 1842784720     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1115/detc2003/vib-48526     Document Type: Conference Paper

References (12)

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