메뉴 건너뛰기




Volumn 15, Issue 1, 2005, Pages 63-70

Design of a linear micro-feeding system featuring bistable mechanisms

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; DEGREES OF FREEDOM (MECHANICS); ELASTIC MODULI; ENERGY UTILIZATION; FORCE MEASUREMENT; MICROMACHINING; SCANNING ELECTRON MICROSCOPY; STRAIN;

EID: 12344295412     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/15/1/010     Document Type: Article
Times cited : (27)

References (18)
  • 2
    • 0030705026 scopus 로고    scopus 로고
    • Application for surface micromachined polysilicon thermal actuators and arrays
    • Comtois J H and Bright V M 1997 Application for surface micromachined polysilicon thermal actuators and arrays Sensors Actuators A 58 19-25
    • (1997) Sensors Actuators A , vol.58 , pp. 19-25
    • Comtois, J.H.1    Bright, V.M.2
  • 3
    • 0033733840 scopus 로고    scopus 로고
    • Low voltage electrothermal vibromotor for silicon optical bench application
    • Pai M and Tien N C 1999 Low voltage electrothermal vibromotor for silicon optical bench application Sensors Actuators 83 237-43
    • (1999) Sensors Actuators , vol.83 , pp. 237-243
    • Pai, M.1    Tien, N.C.2
  • 4
    • 0036686315 scopus 로고    scopus 로고
    • Single mask large force, and large displacement electrostatic linear inchworm motors
    • Yeh R, Hollar S and Pister K S J 2002 Single mask large force, and large displacement electrostatic linear inchworm motors J. Microelectromech. Syst. 11 330-6
    • (2002) J. Microelectromech. Syst. , vol.11 , pp. 330-336
    • Yeh, R.1    Hollar, S.2    Pister, K.S.J.3
  • 5
    • 0036118176 scopus 로고    scopus 로고
    • Characterization of micromachined inchworm motors with thermalelastic linkage actuators
    • Kwon H N and Lee J H 2002 Characterization of micromachined inchworm motors with thermalelastic linkage actuators IEEE 586-9
    • (2002) IEEE , pp. 586-589
    • Kwon, H.N.1    Lee, J.H.2
  • 9
    • 0027664612 scopus 로고
    • Controlled stepwise motion in polysilicon microstructures
    • Akiyama T and Shono K 1993 Controlled stepwise motion in polysilicon microstructures IEEE J. Microelectromech. Syst. 3 106-10
    • (1993) IEEE J. Microelectromech. Syst. , vol.3 , pp. 106-110
    • Akiyama, T.1    Shono, K.2
  • 10
    • 0033187795 scopus 로고    scopus 로고
    • Design of two-link in-plane bistable compliant mechanism
    • Jensen B D, Howell L L and Salmon L G 1999 Design of two-link in-plane bistable compliant mechanism ASME J. Mech. Design 121 416-23
    • (1999) ASME J. Mech. Design , vol.121 , pp. 416-423
    • Jensen, B.D.1    Howell, L.L.2    Salmon, L.G.3
  • 11
    • 0031098222 scopus 로고    scopus 로고
    • Scratch drive actuator with mechanical links for self-assembly of three-dimensional MEMS
    • Akiyama T, Collard D and Fujita H 1997 Scratch drive actuator with mechanical links for self-assembly of three-dimensional MEMS J. Microelectromech. Syst. 6 10-7
    • (1997) J. Microelectromech. Syst. , vol.6 , pp. 10-17
    • Akiyama, T.1    Collard, D.2    Fujita, H.3
  • 18
    • 0037438905 scopus 로고    scopus 로고
    • A reliable single-layer out-of-plane micromachined thermal actuator
    • Chen W C, Chu C C, Hsieh J and Fang W 2003 A reliable single-layer out-of-plane micromachined thermal actuator Sensors Actuators A 103 48-58
    • (2003) Sensors Actuators A , vol.103 , pp. 48-58
    • Chen, W.C.1    Chu, C.C.2    Hsieh, J.3    Fang, W.4


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.