Effect of temperature on capacitive RF MEMS switch performance - A coupled-field analysis

Journal of Micromechanics and Microengineering

Volumn 14, Issue 8, 2004, Pages 1270-1279

  Zhu, Yong ^a   Espinosa, Horacio D ^a  

^a Northwestern University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITANCE; DIELECTRIC MATERIALS; ELECTRODES; FINITE ELEMENT METHOD; RELIABILITY; SWITCHES; THERMAL EFFECTS; THERMAL EXPANSION;

ACTUATION VOLTAGE; COUPLED-FIELD ANALYSIS; PULL-IN VOLTAGE; RADIO FREQUENCIES (RF);

MICROELECTROMECHANICAL DEVICES;

EID: 4243171429     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/14/8/021     Document Type: Article

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