Nonlinear dynamic study of a bistable MEMS: Model and experiment

Journal of Microelectromechanical Systems

Volumn 13, Issue 5, 2004, Pages 725-731

  Sulfridge, Marc ^a   Saif, Taher ^a   Miller, Norman ^a   Meinhart, Mark ^a  

^a UNIVERSITY OF ILLINOIS AT URBANA CHAMPAIGN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; DYNAMICS; LASER PULSES; MATHEMATICAL MODELS; MICROACTUATORS; OSCILLATIONS;

ACTUATION SCHEME; BISTABLE MEMS; MICROELECTROMECHANICAL SYSTEMS;

MICROELECTROMECHANICAL DEVICES;

EID: 7444255579     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2004.835766     Document Type: Article

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