A new age for MEMS

Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05

Volumn 1, Issue , 2005, Pages 1-4

  Petersen, Kurt ^a  

^a SiTime Corporation   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DIGITAL MIRROR DISPLAYS; INTEGRATED CIRCUIT INDUSTRY; SILICON PRESSURE SENSORS;

ACCELEROMETERS; INTEGRATED CIRCUITS; PARTIAL PRESSURE SENSORS; SEMICONDUCTOR DEVICE MANUFACTURE;

MICROELECTROMECHANICAL DEVICES;

EID: 27544465889     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2005.1496344     Document Type: Conference Paper

References (0)