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Volumn 13, Issue 6, 2003, Pages 948-954

Modeling and experimental characterization of the chevron-type bi-stable microactuator

Author keywords

[No Author keywords available]

Indexed keywords

FINITE ELEMENT METHOD; OPTICAL SWITCHES; POTENTIAL ENERGY; STIFFNESS; STRESS ANALYSIS;

EID: 0242721259     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/13/6/318     Document Type: Article
Times cited : (80)

References (15)
  • 4
    • 0242555375 scopus 로고    scopus 로고
    • A centrally-clamped parallel-beam MEMS mechanism
    • Jin Q, Lang J H and Slocum A H 2001 A centrally-clamped parallel-beam MEMS mechanism IEEE MEMS Conf. pp 64-67
    • (2001) IEEE MEMS Conf. , pp. 64-67
    • Jin, Q.1    Lang, J.H.2    Slocum, A.H.3
  • 5
    • 0036851082 scopus 로고    scopus 로고
    • Parametric study and optimization of a micro-optical switch with a laterally driven electromagnetic microactuator
    • Han J S, Ko J S, Kim Y T and Kwak B M 2002 Parametric study and optimization of a micro-optical switch with a laterally driven electromagnetic microactuator J. Micromech. Microeng. 12 939-47
    • (2002) J. Micromech. Microeng. , vol.12 , pp. 939-947
    • Han, J.S.1    Ko, J.S.2    Kim, Y.T.3    Kwak, B.M.4
  • 9
    • 0025600732 scopus 로고
    • On a nonvolatile memory cell based on microelectromechanics
    • Halg B 1990 On a nonvolatile memory cell based on microelectromechanics Proc. IEEE 172-6
    • (1990) Proc. IEEE , pp. 172-176
    • Halg, B.1
  • 13
    • 0033187795 scopus 로고    scopus 로고
    • Design of two-link, in-plane, bi-stable compliant micro-mechanisms
    • Jensen B D, Howell L L and Salmon L G 1999 Design of two-link, in-plane, bi-stable compliant micro-mechanisms Trans. ASME 416-23
    • (1999) Trans. ASME , pp. 416-423
    • Jensen, B.D.1    Howell, L.L.2    Salmon, L.G.3
  • 14
    • 84884607861 scopus 로고    scopus 로고
    • Identification of compliant pseudo-rigid-body mechanism configurations resulting in bi-stable behavior
    • DETC2000/MECH-14147
    • Jensen B D and Howell L L 2000 Identification of compliant pseudo-rigid-body mechanism configurations resulting in bi-stable behavior Proc. ASME Int. Mech. Eng. Congress and Exposition DETC2000/MECH-14147
    • (2000) Proc. ASME Int. Mech. Eng. Congress and Exposition
    • Jensen, B.D.1    Howell, L.L.2
  • 15
    • 0036601273 scopus 로고    scopus 로고
    • Effect of process parameters on the surface morphology and mechanical performance of silicon structures after deep reactive ion etching (DRIE)
    • Chen J S et al 2002 Effect of process parameters on the surface morphology and mechanical performance of silicon structures after deep reactive ion etching (DRIE) J. Microelectromech. Syst. 11 264-75
    • (2002) J. Microelectromech. Syst. , vol.11 , pp. 264-275
    • Chen, J.S.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.