Microsensors, microelectromechanical systems (MEMS), and electronics for smart structures and systems

Smart Materials and Structures

Volumn 9, Issue 6, 2000, Pages 953-972

  Varadan, V K ^a   Varadan, V V ^a  

^a PENNSYLVANIA STATE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; FABRICATION; FEEDBACK CONTROL; MICROELECTROMECHANICAL DEVICES; MICROELECTRONICS; MICROSENSORS; SIGNAL PROCESSING; TRANSDUCERS;

INTERDIGITAL TRANSDUCERS (IDTS);

INTELLIGENT STRUCTURES;

EID: 0034498290     PISSN: 09641726     EISSN: None     Source Type: Journal    
DOI: 10.1088/0964-1726/9/6/327     Document Type: Article

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