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Journal of Micromechanics and Microengineering

Volumn 8, Issue 1, 1998, Pages 29-32

A lateral symmetrically bistable buckled beam

(2) Vangbo, Mattias a Bäcklund, Ylva a

a UPPSALA UNIVERSITY (Sweden)

Author keywords

[No Author keywords available]

Indexed keywords

BONDING; BUCKLING; MICROMACHINING; POLISHING; REACTIVE ION ETCHING; SCANNING ELECTRON MICROSCOPY; SILICON ON INSULATOR TECHNOLOGY; SILICON WAFERS; THERMOOXIDATION;

BLACK SILICON METHOD; SYMMETRICALLY BISTABLE BUCKLED BEAMS;

MICROELECTROMECHANICAL DEVICES;

EID: 0032024150 PISSN: 09601317 EISSN: None Source Type: Journal
DOI: 10.1088/0960-1317/8/1/005 Document Type: Article

Times cited : (82)

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