Design and investigation of multi-level digitally positioned micromirror for open-loop controlled applications

Sensors and Actuators, A: Physical

Volumn 103, Issue 1-2, 2003, Pages 271-283

  Zhang, Jianglong ^a   Zhang, Zhongxia ^a   Lee, Y C ^a   Bright, Victor M ^a   Neff, John ^a  

^a UCB 450   (United States)

Author keywords

Digital; MEMS; Micromirror; Open loop; Optical cross connect; Repeatability

Indexed keywords

BOUNDARY ELEMENT METHOD; CLOSED LOOP CONTROL SYSTEMS; COMPUTER SIMULATION; ELECTRIC DRIVES; ELECTRIC POTENTIAL; ENERGY UTILIZATION; FINITE ELEMENT METHOD; MICROELECTROMECHANICAL DEVICES; OPTICAL SWITCHES;

MICROMIRRORS; OPEN LOOP CONTROL SYSTEMS;

MIRRORS;

EID: 0037439027     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(02)00340-0     Document Type: Conference Paper

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