Large displacement parallel plate electrostatic actuator with saturation type characteristic

Sensors and Actuators, A: Physical

Volumn 130-131, Issue SPEC. ISS., 2006, Pages 497-512

  Krylov, Slava ^a   Bernstein, Yacov ^b  

^a TEL AVIV UNIVERSITY   (Israel)

^b Teraop Ltd   (Israel)

Author keywords

Curved beam; Electrostatic actuator; Multistability; Parallel plate electrode; Pull in

Indexed keywords

ARCHITECTURE; CURVED BEAMS AND GIRDERS; ELECTRODES; PARAMETER ESTIMATION; REACTIVE ION ETCHING; SATURATION (MATERIALS COMPOSITION); VOLTAGE CONTROL;

ACTUATING FORCE; MULTISTABILITY; PARALLEL PLATE ELECTRODES; PARALLEL PLATE ELECTROSTATIC ACTUATORS; PULL-IN;

ELECTROSTATIC ACTUATORS;

EID: 33745857295     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2005.11.063     Document Type: Article

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