On a tunable bistable MEMS - theory and experiment

Journal of Microelectromechanical Systems

Volumn 9, Issue 2, 2000, Pages 157-170

  Saif, M Taher A ^a  

^a University of Illinois at Urbana Champaign   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; BUCKLING; DATA STORAGE EQUIPMENT; MATHEMATICAL MODELS; RESIDUAL STRESSES; STIFFNESS; SYSTEM STABILITY;

AXIAL LOAD; BISTABLE SYSTEM; COMB DRIVE; OPTOMECHANICAL COMPUTING ELEMENT; THRESHOLD FORCE;

MICROELECTROMECHANICAL DEVICES;

EID: 0042874104     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/84.846696     Document Type: Article

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