Surface chemistry and tribology of MEMS

Annual Review of Physical Chemistry

Volumn 55, Issue , 2004, Pages 35-54

  Maboudian, Roya ^a   Carraro, Carlo ^a  

^a University of California   (United States)

Author keywords

Adhesion; Friction; Lubrication; Micromachines; Monolayers; Wear

Indexed keywords

ADHESION; FRICTION; LUBRICATION; MICROMACHINING; MONOLAYERS; SURFACE CHEMISTRY; TRIBOLOGY; WEAR OF MATERIALS;

ADHESION FORCE; MICROMACHINES; SURFACE-TO-VOLUME RATIO; WEAR;

MICROELECTROMECHANICAL DEVICES;

BIOMATERIAL; SILICON;

ADHESION; BIOMECHANICS; CHEMISTRY; COMPARATIVE STUDY; ELECTROCHEMISTRY; ELECTRONICS; EQUIPMENT DESIGN; FRICTION; HARDNESS; MATERIALS TESTING; METHODOLOGY; REVIEW; SURFACE PROPERTY;

ADHESIONS; BIOCOMPATIBLE MATERIALS; BIOMECHANICS; ELECTROCHEMISTRY; EQUIPMENT DESIGN; FRICTION; HARDNESS; MATERIALS TESTING; MINIATURIZATION; SILICON; SURFACE PROPERTIES;

EID: 3343016661     PISSN: 0066426X     EISSN: None     Source Type: Book Series    
DOI: 10.1146/annurev.physchem.55.091602.094445     Document Type: Review

References (94)

1. Dowson D. 1998. History of Tribology. London: Prof. Eng. Publ.
2. Kendall K. 1994. Science 263:1720
3. Feynman R. 1992. J. Microelectromech. Syst. 1:60-66
4. Tas N, Sonnenberg T, Jansen H, Legtenberg R, Elwenspoek M. 1996. J. Micromech. Microeng. 6:385-97
5. Mastrangelo CH. 1997. Tribol. Lett. 3:223-38
6. Maboudian R, Howe T. 1997. J. Vac. Sci. Technol. B 15:1-20
7. Maboudian R, Howe T. 1997. Tribol. Lett. 3:215-21
8. Maboudian R. 1998. Surf. Sci. Rep. 30:207-69
9. Bushan B, ed. 1998. Tribology Issues and Opportunities in MEMS. Dordrecht, Neth: Kluwer Acad.
10. Maboudian R. 1998. MRS Bull. 23:47-51
11. Rymuza Z. 1999. Microsystem Technol. 5:173-80
12. de Boer MP, Mayer TM. 2001. MRS Bull. 26:302-4
13. Komvopoulos K. 2003. J. Adhes. Sci. Technol. 17:477-517
14. Zhao YP, Wang LS, Yu TX. 2003. J. Adhes. Sci. Technol. 17:519-46
15. Henck S. 1997. Tribol. Lett. 3:239-47
16. Ashurst WR, Carraro C, Maboudian R. 2002. Tribol. Lett. 12:95-100
17. Saif MTA, MacDonald NC. 1998. J. Mater. Res. 13:3353-56
18. Tas NR, Gui C, Elwenspoek M. 2003. J. Adhes. Sci. Technol. 17:547-61
19. Madou MJ. 1997. Fundamentals of Micro-fabrication. Boca Raton, FL: CRC Press
20. Petersen K. 1982. Proc. IEEE 70:420-57
21. Pang SW. 2001. MRS Bull. 26:307-8
22. Hruby J. 2001. MRS Bull. 26:337-40
23. Howe RT. 1988. J. Vac. Sci. Technol. B 6:1809-13
24. Muller RS. 1990. Sens. Actuators A 21-23:1-8
25. Sniegowski JJ, de Boer MP. 2000. Annu. Rev. Mater. Sci. 30:299-333
26. Mehregany M, Zorman CA. 2001. MRS Bull. 26:289-90
27. Hornbeck LJ. 2001. MRS Bull. 26:325-27
28. Deleted in proof
29. Miller S, Sniegowski JJ, LaVigne G, McWorther PJ. 1996. Proc. SPIE Smart Electron. MEMS 2722:197-204
30. Tai YC, Muller RS. 1990. Sens. Actuators A 21-23:180-83
31. Iler RK. 1979. The Chemistry of Silica. New York: Wiley
32. Israelachvili JN, McGuiggan P, Horn R. 1991. Proc. 1st Int. Symp. Semicond. Wafer Bond.: Sci. Technol. Appl. Phoenix, Ariz., pp. 33
33. Alley RL, Howe RT, Komvopoulos K. 1992. Proc. IEEE Solid-State Sensor and Actuator Workshop, Hilton Head '92, Hilton Head Island, S.C., pp. 202-7
34. Kim CJ, Kim JY, Sridharan B. 1998. Sens. Actuators A 64:17-26
35. Guckel H, Sniegowski JJ, Christenson TR, Raissi F. 1990. Sens. Actuators A 21-23:346-51
36. Mulhern GT, Soane DS, Howe RT. 1993. Proc. 7th Int. Conf. Solid-State Sensors and Actuators, Transducers '93, Yokohama, Jpn. pp. 296-300
37. Kozlowski F, Lindmair N, Scheiter Th, Hierold C, Lang W. 1995. Proc. 8th Int. Conf. Solid-State Sensors and Actuators, Transducers '95, Stockholm, Swed. pp. 220-23
38. Lee JH, Lee YI, Jang WI, Lee CS, Yoo HJ. 1998. Sens. Actuators A 64:27-32
39. Mastrangelo CH, Saloka OS. 1993. Proc. IEEE Micro-Electro-Mechanical Systems Workshop, Ft. Lauderdale, Fla. pp. 77-81
40. Kobayashi D, Kim CJ, Fujita H. 1993. Jpn. J. Appl. Phys. 32:L1642-44
41. Suh HJ, Bharathi P, Beebe DJ, Moore JS. 2000. J. Microelectromech. Syst. 9:198-205
42. Cabuz C, Cabuz EI, Ohnstein TR, Neus J, Maboudian R. 2000. Sens. Actuators A 79:245-50
43. Fan LS, Tai YC, Muller RS. 1988. IEEE Int. Electron Devices Meeting, San Francisco, Calif., pp. 666-70
44. Alley RL, Mai P, Komvopolous K, Howe RT. 1993. Proc. 7th Int. Conf. Solid-State Sensors and Actuators, Transducers '93, Yokohama, Jpn. pp. 288-291
45. Yee Y, Chun K, Lee JD. 1995. Proc. Int. Conf. Solid-State Sensors and Actuators, Transducers '95, Stockholm, Swed. pp. 206-9
46. Ulman A. 1991. An Introduction to Ultrathin Organic Films: From Langmuir-Blodgett to Self-Assembly. Boston/New York: Academic
47. Carraro C, Magagnin L, Maboudian R. 2002. Electrochim. Acta 47:2583-88
48. Houston MR, Howe RT, Maboudian R. 1997. J. Appl. Phys. 81:3474-83
49. Srinivasan U, Houston MR, Howe RT, Maboudian R. 1998. J. Microelectromech. Syst. 7:252-60
50. Ashurst WR, Carraro C, Maboudian R. 2000. Sens. Actuators A 82:219-23
51. Kim BH, Chung TD, Oh CH, Chun K. 2001. J. Microelectromech. Syst. 10:33-40
52. Ashurst WR, Yau C, Carraro C, Dugger MT, Maboudian R. 2001. J. Microelectromech. Syst. 10:41-49
53. Ashurst WR, Yau C, Carraro C, Howe RT, Maboudian R. 2001. Sens. Actuators A 91:239-48
54. Jun Y, Zhu X. 2003. J. Adhes. Sci. Technol. 17:593-601
55. Mayer TM, de Boer MP, Shinn ND, Clews PJ, Michalske TA. 2000. J. Vac. Sci. Tech. B 18:2433-40
56. Ashurst WR, Carraro C, Frey W, Maboudian R. 2003. Sens. Actuators A 104:213-21
57. Bhattacharya E, Kuang J, Judy M, Martin J. 2001. Proc. SPIE Int. Symp. MEMS, Adelaide, Aust.
58. Man PF, Gogoi BP, Mastrangelo CH. 1997. J. Microelectromech. Syst. 6:25-34
59. Smith BK, Sniegowski JJ, LaVigne G, Brown CD. 1998. Sens. Actuators A 70:159-63
60. Mani SS, Fleming JG, Walraven JA, Sniegowski JJ, de Boer MP, et al. 2000. Proc. IEEE 38th Int. Reliability Phys. Symp., San Jose, Calif., pp. 146-51
61. Ashurst WR, Wijesundara MBJ, Carraro C, Maboudian R. Tribol. Lett. submitted
62. Mayer TM, Elam JW, George SM, Kotula PG, Goeke RS. 2003. Appl. Phys. Lett. 82:2883-85
63. Ashurst WR, Jang YJ, Magagnin L, Carraro C, Sung MM, Maboudian R. 2004. Proc. IEEE Micro-Electro-Mechanical Systems Conf. Maastricht, Neth. In press
64. Magagnin L, Maboudian R, Carraro C. 2001. Electrochem. Solid State Lett. 4:C5-7
65. Magagnin L, Maboudian R, Carraro C. 2002. J. Phys. Chem. B 106:401-7
66. Israelachvili JN. 1985. Intermolecular and Surface Forces, London: Academic
67. Binnig G, Quate CF, Gerber Ch. 1986. Phys. Rev. Lett. 56:930-33
68. Mate CM, McClelland GM, Erlandsson R, Chiang S. 1987. Phys. Rev. Lett. 59:1942-45
69. Mastrangelo CH, Hsu CH. 1992. Proc. IEEE Solid-State Sensor and Actuator Workshop, Hilton Head Island, S.C., pp. 208-12
70. de Boer MP, Michalske TA. 1999. J. Appl. Phys. 86:817-27
71. Jensen BD, Bitsie F, de Boer MP. 1999. Proc. SPIE. 3875:61-72
72. Ayon AA, Braff R, Lin CC, Sawin HH, Schmidt MA. 1999. J. Electrochem. Soc. 146:339-49
73. Ashurst WR, deBoer MP, Carraro C, Maboudian R. 2003. Appl. Surf. Sci. 212-213:735-41
74. Lim MG, Chang JC, Schultz DP, Howe RT, White RM. 1990. Proc. IEEE Micro-Electro-Mechanical Systems Workshop, Napa Valley, Calif., pp. 82-88
75. Srinivasan U, Foster JD, Habib U, Howe RT, Maboudian R, et al. 1998. Proc. 1998 Solid-State Sensor and Actuator Workshop, Hilton Head Island, S.C., pp. 156-61
76. de Boer MP, Luck DL, Walraven JA, Redmond JM. 2001. Proc. SPIE 4558:169-80
77. Senft DC, Dugger MT. 1997. Proc. SPIE 3224:31-38
78. de Boer MP, Clews PJ, Smith BK, Michalske TA. 1998. Proc. Symp. Mater. Res. Soc. Warrendale, Penn., pp. 131-36
79. Alley RL, Komvopoulos K, Howe RT. 1994. J. Appl. Phys. 76:5731-37
80. Hertz H. 1882. Z. Angew. Math. 92:156
81. Greenwood JA, Williamson JBP. 1966. Proc. R. Soc. London Ser. A 295:300
82. Johnson KL, Kendall K, Roberts AD. 1971. Proc. R. Soc. London Ser. A 324:301
83. Fuller KNG, Tabor D. 1975. Proc. R. Soc. London Ser. A 345:327
84. Derjaguin BV, Muller VM, Toporov YP. 1975. J. Coll. Interface Sci. 53:314
85. Maugis D. 1992. J. Coll. Interface Sci. 150:243
86. Mazur P, Maradudin AA. 1981. Phys. Rev. B 23:695-705
87. Majumdar A, Bushan B. 1991. J. Tribol. 113:1-11
88. Komvopoulos K, Van W. 1998. J. Tribol. 120:1-9
89. Bhushan B, Israelachvili J, Landman U. 1995. Nature 374:607-16
90. Cléchet P, Martelet C, Belin M, Zarrad H, Jaffrezic-Renault N, Fayeulle S. 1994. Sens. Actuators A 44:77-81
91. Deng K, Collins RJ, Mehregany M, Sukenik CN. 1995. J. Electrochem. Soc. 142:1278-85
92. Tanner DM. 2000. Proc. 22nd Int. Conf. Microelect., Nis, Yugosl., pp. 97-104
93. Lee KW, Yu KS, Kim Y. 1997. J. Cryst. Growth 179:153-60
94. Stoldt CR, Fritz MC, Carraro CR, Maboudian R. 2001. Appl. Phys. Lett. 79:347-49