Stiction reduction processes for surface micromachines

Tribology Letters

Volumn 3, Issue 3, 1997, Pages 215-221

  Maboudian, Roya ^a   Howe, Roger T ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

Adhesion; MEMS; Stiction; Surface micromachining

Indexed keywords

EID: 0001064718     PISSN: 10238883     EISSN: None     Source Type: Journal    
DOI: 10.1023/A:1019185206471     Document Type: Article

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