Microinstruments for submicron material studies

Journal of Materials Research

Volumn 13, Issue 12, 1998, Pages 3353-3356

  Saif, M T A ^a,b   MacDonald, N C ^a  

^a Department of Obstetrics Gynecology   (United States)

^b UNIVERSITY OF ILLINOIS AT URBANA CHAMPAIGN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0041009583     PISSN: 08842914     EISSN: None     Source Type: Journal    
DOI: 10.1557/JMR.1998.0454     Document Type: Article

References (6)

1. W. C. Tang, T. H. Nguyen, and R. T. Howe, Sensors and Actuators 20, 25-32 (1989); Technical Papers, San Francisco, California, 1991, pp. 205-208.
2. W. C. Tang, T. H. Nguyen, and R. T. Howe, Sensors and Actuators 20, 25-32 (1989); Technical Papers, San Francisco, California, 1991, pp. 205-208.
3. Z.L. Zhang and N. C. MacDonald, J-MEMS 2 (2), 6672 (1993).
4. K.A. Shaw, Z.L. Zhang, and N.C. MacDonald, Sensors and Actuators A 40, 63-70 (1994).
5. M.T.A. Saif and N.C. MacDonald, Rev. Sci. Instrum. 69 (3), 1410-1422 (1998).
6. S. G. Lekhnitskii, Theory of Elasticity of an Anisotropic Body (Mir Publishers, Moscow, 1981).