Stiction in surface micromachining

Journal of Micromechanics and Microengineering

Volumn 6, Issue 4, 1996, Pages 385-397

  Tas, Niels ^a   Sonnenberg, Tonny ^a   Jansen, Henri ^a   Legtenberg, Rob ^a   Elwenspoek, Miko ^a  

^a UNIVERSITY OF TWENTE   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

ADHESION; ELECTROSTATICS; LAPLACE TRANSFORMS; MICROELECTROMECHANICAL DEVICES; STICTION; SUBSTRATES; SURFACE PROPERTIES; SURFACE ROUGHNESS; THIN FILMS; VAN DER WAALS FORCES;

ADHESION MECHANISMS; CAPILLARY FORCES; ELECTROSTATIC FORCES; HYDROGEN BRIDGING; PRESSURE DIFFERENCE; SIDEWALL SPACERS; SURFACE MICROMACHINING; SURFACE SMOOTHNESS;

MICROMACHINING;

EID: 0030364402     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/6/4/005     Document Type: Article

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