Adhesion and friction forces in microelectromechanical systems: Mechanisms, measurement, surface modification techniques, and adhesion theory

Journal of Adhesion Science and Technology

Volumn 17, Issue 4, 2003, Pages 477-517

  Komvopoulos, K ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

Adhesion forces; contact mechanics; friction; microelectromechanical systems (MEMS); self assembled monolayers; stiction; surface modification methods

Indexed keywords

ADHESION FORCES; ANALYTICAL RESULTS; CONTACT MECHANICS; CONTROL TASK; ELASTIC-PLASTIC; ELECTROSTATIC ATTRACTIVE FORCES; FINITE ELEMENT SIMULATIONS; FRACTAL GEOMETRY; FRICTION FORCE; INTERFACIAL FORCES; LOW SURFACE ENERGY; MEMSDEVICES; MICRO CONTACT; MICRO DEVICES; MICRO-SCALES; MICROELECTROMECHANICAL SYSTEMS (MEMS); MICROFEATURES; MICROMACHINES; MINIATURIZED DEVICES; NOVEL METHODS; REPULSIVE FORCES; SCIENCE AND ENGINEERING; STAND-OFF; STATIC AND DYNAMIC; SURFACE ATTACHMENT; SURFACE CHEMICALS; SURFACE INTERACTIONS; SURFACE MODIFICATION METHODS; SURFACE MODIFICATION TECHNIQUES; SURFACE-TEXTURING; SURFACE-TO-VOLUME RATIO; THERMAL PHENOMENA; VAN DER WAALS;

ADSORPTION; COMPOSITE MICROMECHANICS; FRICTION; MECHATRONICS; MEMS; MICROELECTROMECHANICAL DEVICES; POLYSILICON; SELF ASSEMBLED MONOLAYERS; STICTION; SURFACE ROUGHNESS; TRIBOLOGY; VAN DER WAALS FORCES; COMPUTER SIMULATION; ELASTOPLASTICITY; FINITE ELEMENT METHOD; INTERFACES (MATERIALS); STIFFNESS; SURFACE CHEMISTRY; SURFACE TREATMENT;

ADHESION;

DYNAMIC FRICTION TESTING; ELECTROSTATIC ATTRACTIVE FORCE; LOW SURFACE ENERGY SELF-ASSEMBLED MONOLAYER; STATIC FRICTION TESTING;

EID: 0037257258     PISSN: 01694243     EISSN: 15685616     Source Type: Journal    
DOI: 10.1163/15685610360554384     Document Type: Article

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