Reliability of surface micromachined MicroElectroMechanical actuators

2000 22nd International Conference on Microelectronics, MIEL 2000 - Proceedings

Volumn 1, Issue , 2000, Pages 97-104

  Tanner, Dandle M ^a  

^a SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROMECHANICAL DEVICES; MEMS; MICROELECTRONICS; FATIGUE OF MATERIALS; FRACTURE; MICROACTUATORS; RELIABILITY; STICTION; THIN FILMS; VIBRATIONS (MECHANICAL); WEAR OF MATERIALS; ACTUATORS;

MEMS ACTUATORS; MICRO-MACHINED; MICROELECTROMECHANICAL ACTUATORS; MICROELECTROMECHANICAL SYSTEMS (MEMS) RELIABILITY; MICROELECTROMECHANICAL ACTUATOR; SURFACE MICROMACHINING;

RELIABILITY; MICROELECTROMECHANICAL DEVICES; SURFACE MICROMACHINING;

EID: 0033300610     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ICMEL.2000.840535     Document Type: Conference Paper

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