Tribology of MEMS

MRS Bulletin

Volumn 26, Issue 4, 2001, Pages 302-304

  De Boer, M P ^a   Mayer, T M ^a  

^a NONE   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001337712     PISSN: 08837694     EISSN: None     Source Type: Journal    
DOI: 10.1557/mrs2001.65     Document Type: Article

References (31)

1. J.J. Sniegowski and M.P. de Boer, Annu. Rev. Mater. Sci. 30 (2000) p. 297.
2. C.H. Mastrangelo and C.H. Hsu, IEEE/ASME J. MEMS 2 (1993) p. 33.
3. G.T. Mulhern, D.S. Soane, and R.T. Howe, in Proc. 7th Int. Conf. on Solid-State Sensors and Actuators (Transducers '93) (IEEE Electron Devices Society, Yokohama, Japan, 1993) p. 296.
4. H. Guckel, D.W. Burns, C.C.G. Visser, H.A.C. Tilmans, and D. Deroo, IEEE Trans. Electron Devices 35 (1988) p. 800.
5. S.A. Henck, Tribol. Lett. 3 (1997) p. 239.
6. J.R. Martin and Y. Zhao, U.S. Patent No. 5,694,740 (1997).
7. R. Maboudian, Surf. Sci. Rep. 3 (1998) p. 209.
8. B.C. Bunker, R.W. Carpick, R. Assink, M.L. Thomas, M.G. Hankins, J.A. Voigt, D.L. Sipola, M.P. de Boer, and G.L. Gulley, Langmuir 16 (2000) p. 7742.
9. J.G. Kushmerick, M.G. Hankins, M.P. de Boer, P.J. Clews, R.W. Carpick, and B.C. Bunker, Tribol. Lett. 10 (1-2) (2000) p.103.
10. U. Srinivasan, M.R. Houston, R.T. Howe, and R. Maboudian, IEEE/ASME J. MEMS 7 (1998) p. 252.
11. M.P. de Boer, J.A. Knapp, T.A. Michalske, U. Srinivasan, and R. Maboudian, Acta Mater. 48 (2000) p. 4531.
12. T.M. Mayer, M.P. de Boer, N.D. Shinn, P.J. Clews, and T.A. Michalske, J. Vac. Sci. Technol., B 18 (2000) p. 2433.
13. B.K. Smith, J.J. Sniegowski, G. La Vigne, and C. Brown, Sens. Actuators, A 70 (1998) p. 159.
14. W.R. Ashurst, C. Yau, C. Carraro, R.T. Howe, and R. Maboudian, in Proc. Solid-State Sensor and Actuator Workshop (Transducers Research Foundation, Cleveland, 2000) p. 320.
15. X.-Y. Zhu, V. Boiadjiev, J.A. Mulder, R.P. Hsung, and R.C. Major, Langmuir 16(2000) p. 6766.
16. V. DePalma and N. Tillman, Langmuir 5 (1989) p. 868.
17. J.D. Kiely, J.E. Houston, J.A. Mulder, R.P. Hsung, and X.-Y. Zhu, Tribal. Lett. 7 (1999) p. 103.
18. R.R. Rye, G.C. Nelson, and M.T. Dugger, Langmuir 13(1997) p. 2965.
19. U. Srinivasan, J.D. Foster, U. Habib, R.T. Howe, R. Maboudian, D.C. Senft, and M.T. Dugger, Prof. Solid-State Sensor and Actuator Workshop (Transducers Research Foundation, Cleveland, 2000) p. 156.
20. S.S. Mani, J.G. Fleming, J.J. Sniegowski, M.P. de Boer, L.W. Irwin, J.A. Walraven, D.M. Tanner, and D.A. La Van, in Materials Science of Microelectromechanical Systems (MEMS) Devices II, edited by M.P. de Boer, A.H. Heuer, S.J. Jacobs, and E. Peeters (Mater. Res. Soc. Symp. Proc. 605, Warrendale, PA, 2000) p. 135.
21. M.P. de Boer, N.F. Smith, N.D. Masters, M.B. Sinclair, and E.J. Pryputniewicz, in ASTM STP 1413 (2001) in press.
22. B.D. Jensen, M.P. de Boer, N.D. Masters, F. Bitsie, and D.A. La Van, IEEE/ASME J. MEMS (2001) in press.
23. B.D. Jensen, M.P. de Boer, and F. Bitsie, in Proc. SPIE Materials and Device Characterization in Micromachining, Vol. 3875, edited by Y. Vladimirsky and C.R. Friedrich (SPIE - The International Society for Optical Engineering, Bellingham, WA, 1999) p. 61.
24. M.P. de Boer and T.A. Michalske, J. Appl. Phys. 86 (1999) p. 817.
25. M.P. de Boer, P.J. Clews, B.K. Smith, and T.A. Michalske, in Microelectromechanical Structures for Materials Research, edited by S. Brown, J. Gilbert, H. Guckel, R. Howe, G. Johnson, P. Krulevitch, and C. Muhlstein (Mater. Res. Soc. Symp. Proc. 518, Warrendale, PA, 1998) p. 131.
26. M.P. de Boer, J.M. Redmond, and T.A. Michalske, in Proc. SPIE Materials and Device Characterization in Micromachining, Vol. 3512 (SPIE - The International Society for Optical Engineering, Bellingham, WA, 1998) p. 241.
27. B.T. Crozier, M.P. de Boer, J.M. Redmond, D.E. Bahr, and T.A. Michalske, in Materials Science of Microelectromechanical Systems (MEMS) Devices II, edited by M.P. de Boer, A.H. Heuer, S.J. Jacobs, and E. Peeters (Mater. Res. Soc. Symp. Proc. 605, Warrendale, PA, 2000) p. 129.
28. R.W. Carpick and M. Salmeron, Chem. Rev. 97 (1997) p. 1163.
29. M. Salmeron, CHEMTECH (September 1998) p. 17.
30. E. Barrena, S. Kopta, D.F. Ogletree, D.H. Charych, and M. Salmeron, Phys. Rev. Lett. 82 (1999) p. 2880.
31. H.I. Kim, M. Graupe, O. Oloba, T. Koini, S. Imaduddin, T.R. Lee, and S.S. Perry, Langmuir 15 (1999) p. 3179.