Adhesion-related failure mechanisms in micromechanical devices

Tribology Letters

Volumn 3, Issue 3, 1997, Pages 223-238

  Mastrangelo, C H ^a  

^a University of Michigan   (United States)

Author keywords

Adhesion; Microelectromechanical systems

Indexed keywords

EID: 2342584918     PISSN: 10238883     EISSN: None     Source Type: Journal    
DOI: 10.1023/A:1019133222401     Document Type: Article

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