Adhesion and friction issues associated with reliable operation of MEMS

MRS Bulletin

Volumn 23, Issue 6, 1998, Pages 47-51

  Maboudian, Roya ^a  

^a NONE

Author keywords

[No Author keywords available]

Indexed keywords

ADHESION; CRYSTAL MICROSTRUCTURE; DEPOSITION; ETCHING; FRICTION; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; POLYCRYSTALS; PROTECTIVE COATINGS; SEMICONDUCTING SILICON; SINGLE CRYSTALS; THIN FILMS;

MICROELECTROMECHANICAL SYSTEMS; SURFACE PROCESSES;

TRIBOLOGY;

EID: 0032098108     PISSN: 08837694     EISSN: None     Source Type: Journal    
DOI: 10.1557/S0883769400030633     Document Type: Article

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