Surface processes in MEMS technology

Surface Science Reports

Volumn 30, Issue 6, 1998, Pages 207-269

  Maboudian, Roya ^a  

^a University of California   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ADHESION; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; PASSIVATION; SINGLE CRYSTALS; SURFACE ROUGHNESS;

MICROELECTROMECHANICAL SYSTEMS; SURFACE MICROMACHINING;

SURFACE PROPERTIES;

EID: 0031707293     PISSN: 01675729     EISSN: None     Source Type: Journal    
DOI: 10.1016/s0167-5729(97)00014-9     Document Type: Article

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