Effect of W coating on microengine performance

Annual Proceedings - Reliability Physics (Symposium)

Volumn , Issue , 2000, Pages 146-151

  Mani, S S ^a   Fleming, J G ^a   Walraven, J A ^a   Sniegowski, J J ^a   de Boer, M P ^a   Irwin, L W ^a   Tanner, D M ^a   LaVan, D A ^a   Dugger, M T ^a   Jakubczak, J ^a   Miller, W M ^a  

^a SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL VAPOR DEPOSITION; DURABILITY; METALLIC FILMS; MICROELECTROMECHANICAL DEVICES; PROTECTIVE COATINGS; SEMICONDUCTING SILICON; TUNGSTEN; WEAR RESISTANCE;

MICROENGINES;

ENGINES;

EID: 0033741693     PISSN: 00999512     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article

References (27)