Thin Teflon-like films for eliminating adhesion in released polysilicon microstructures

Sensors and Actuators, A: Physical

Volumn 70, Issue 1-2, 1998, Pages 159-163

  Smith, Bradley K ^a   Sniegowski, Jeffry J ^a   LaVigne, Glenn ^a   Brown, Craig ^a  

^a SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

Adhesion; Fluorocarbon; Microelectromechanical systems (MEMS); Microstructures; Polysilicon; Stiction

Indexed keywords

EID: 0042579641     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(98)00127-7     Document Type: Article

References (7)

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