Noncyclic Scheduling of Cluster Tools With a Branch and Bound Algorithm

IEEE Transactions on Automation Science and Engineering

Volumn 12, Issue 2, 2015, Pages 690-700

  Kim, Hyun Jung ^a   Lee, Jun Ho ^b   Lee, Tae Eog ^a  

^a Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

^b SAMSUNG Electronics   (South Korea)

Author keywords

Branch and bound (B B) algorithm; cluster tool; noncyclic scheduling; Petri net

Indexed keywords

ALGORITHMS; BRANCH AND BOUND METHOD; CLUSTERING ALGORITHMS; MATERIALS HANDLING; PETRI NETS; SCHEDULING ALGORITHMS; SEMICONDUCTOR DEVICE MANUFACTURE; TOOLS;

ANALYSIS CAPABILITIES; BRANCH-AND-BOUND ALGORITHMS; CLUSTER TOOL; MATERIAL HANDLING ROBOTS; MODELING ABILITIES; MULTIPLE PROCESSING; SCHEDULING METHODS; SCHEDULING PROBLEM;

SCHEDULING;

EID: 85027947961     PISSN: 15455955     EISSN: None     Source Type: Journal    
DOI: 10.1109/TASE.2013.2293552     Document Type: Article

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