Cyclic scheduling of cluster tools with nonidentical chamber access times between parallel chambers

IEEE Transactions on Semiconductor Manufacturing

Volumn 25, Issue 3, 2012, Pages 420-431

  Kim, Dae Kyu ^a   Jung, Yu Ju ^b   Jung, Chihyun ^c   Lee, Tae Eog ^a  

^a Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

^b POSCO   (South Korea)

^c IBM MICROELECTRONICS   (United States)

Author keywords

Backward sequence; chamber access times; cluster tools; cyclic scheduling; swap sequence

Indexed keywords

BACKWARD SEQUENCE; CHAMBER ACCESS TIMES; CLUSTER TOOL; CYCLIC SCHEDULING; SWAP SEQUENCE;

COMPUTER PROGRAMMING; OPTIMIZATION; PETRI NETS; SCHEDULING;

TOOLS;

EID: 84864684799     PISSN: 08946507     EISSN: None     Source Type: Journal    
DOI: 10.1109/TSM.2012.2199329     Document Type: Article

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